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Reflectivity - 6 Pages

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Catalogue excerpts

X’PERT REFLECTIVITY Analysis of X-ray reflectometry and diffuse scattering data The Analytical X-ray Company

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X’PERT REFLECTIVITY Software for handling X-ray reflectometry data X’Pert Reflectivity is an analytical software package for displaying, simulating and fitting X-ray reflectometry data. The software has been developed to bring reflectometry, formerly the preserve of highly professional researchers, into the realm of routine users. Specular reflectivity data allow determining layer thickness, density and interface roughness of thinlayered structures. Furthermore X’Pert Reflectivity offers to investigate quickly and easily interfacial roughness in multi-layers and thin films by analysing off-specular...

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Principal features of X’Pert Reflectivity • Displaying and simulating of off-specular (ω-2θ and offset) diffuse scattering data. Three interface models are available (see explanation box) • Single-scan graphics (measured plus simulated scan in one window) • Simulation of coplanar Qx, Qz reciprocal space maps • Thickness determination using Fourier analysis and/or fringe spacing • Supports ω-2θ and 2θ-ω scans with offset, allowing correction for differences in the scan axis and giving you greater flexibility in setting up your experiments • Sample editor proven in X’Pert Epitaxy and Smoothfit that...

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Automatic fitting The automatic fitting procedure for specular reflectivity curves performs multiple simulations to refine selected sample and instrument parameters to obtain the best fit with the measured data. Layer parameters - density, thickness and roughness - as well as background, divergence and intensity can be allowed to vary over a specified range, and you can also specify the percentages over which the parameters will vary at the start and at the end of fitting. X’Pert Reflectivity offers three fitting procedures: 1. Segmented fitting derived from the automatic fitting procedure of...

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Combining X-ray scattering methods for the analysis of Si-based heterostructures High-resolution X-ray diffraction (XRD), X-ray reflectivity (XRR) and X-ray diffuse scattering are excellent complementary methods for analysing thin layered heterostructures. The upper figure shows the highresolution diffraction pattern of a step graded two layers SiGe structure capped with a thin Si layer. This is a typical heterojunction bipolar transistor (HBT) device structure. A refinement already involves 5 layer parameters. With automatic fitting software this can be accomplished within minutes. A perfect...

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PANalytical PANalytical is the world’s leading supplier of analytical instrumentation and software for X-ray diffraction (XRD) and X-ray fluorescence spectrometry (XRF), with more than half a century of experience. The materials characterization equipment is used for scientific research and development, for industrial process control applications and for semiconductor metrology. PANalytical, formerly Philips Analytical, employs around 850 people worldwide. Its headquarters are in Almelo, the Netherlands. Fully equipped application laboratories are established in Japan, China, the USA, and the...

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