BT-CCD camera C8000-30
1 / 2ページ

an O High-sensitivity imaging from UV to near-infrared wavelengths • UV: Quantum efficiency over 60 % (at 200 nm) • Near-infrared: Quantum efficiency over 90 % (at 650 nm) ♦ Quantum efficiency in UV source (reference data) (This is typical value) * UV light irradiation may cause a drop in sensitivity and increase the dark current of the CCD sensor. The C8000-30 employs an ultrahigh-sensitivity back-thinned CCD sensor made by Hamamatsu, which offers extremely high quantum efficiency in a wide range of UV, VIS and NIR wavelengths. The high UV sensitivity from 120 nm is useful for semiconductor mask inspection and measurement applications. Also, the high NIR sensitivity is useful for fluorescence measurement, NIR LD measurement and so on. ^PECTRALBSPONSP In a normal CCD with front-illuminated CCD structure, the light sensitive pixels have a charge transfer function as well, and this function requires the front surface of light sensitive pixels to be covered by a semi-transparent Poly-Si electrode for the charge transfer function. The Poly-Si electrode absorbs some percentage of incoming photons depending on their wavelength. Especially of the UV light is not able to reach the light sensitive pixels. To overcome this disadvantage, in a back-thinned CCD, the CCD is turned upside down and this back side of the CCD is thinned to 10-15 mm in thickness. Incident photons now enter the CCD from the back-thinned side, without the Poly-Si electrode in the light path. Then QE values of greater than 90 % can be achieved. • Normal CCD Back-Thinned CCD Light sensitive pixels e-Gate electrodes

: SYSTEM SPECIFICATIONS Type number OPTIONS • Camera adapter : A13206-01 • Power cable 5 m : A9071-05 (Unit: mm) • Camera head (Approx. 1.3 kg) • Camera adapter A13206-01 (Approx. 0.8 kg) (Option) 140 • Product and software package names noted in this documentation are trademarks or registered trademarks of their respective manufacturers. • Subject to local technical requirements and regulations, availability of products included in this promotional material may vary. Please consult your local sales representative. • Information furnished by HAMAMATSU is believed to be reliable. However, no...