Wafer Cassette
1 / 6ページ

{{requestButtons}}

カタログの抜粋

Wafer Cassette - 2

Palbam Class WAFER CASSETTE The dramatic increase in the level and complexity of cleanliness and automation requirements in Semiconductor Fabs, requires wafer cassettes that offer a reduction in particle generation and improved mechanical interface capabilities with automated material-handling systems (AMHS’s) and process tools. Unique Stainless Steel Solutions Palbam Class Stainless Steel cassettes have the following properties: • Non contaminating • Non deforming • Highly accurate dimensions - robotic suitability • Withstands baking processes up to 400°C • Designed and manufactured to...

カタログの2ページ目を開く
Wafer Cassette - 3

Palbam Class WAFER CASSETTE The Palbam Class™, innovative Stainless Steel wafer cassette is designed to replace standard plastic cassettes, in the semiconductor manufacturing process. The cassette has been designed to SEMI standard. 6 inch wafer bake cassettes with H Bar & either 25 or 12 slots. Properties: • non-contaminating. • non-deforming. • fully conductive. • withstands temperatures up to 400°C. • with “H” bar. • dimensions are highly accurate. • weighs 800 gr. • designed for both manual and robotic handling. • fits into standard boxes. • Fabrication material: 316 stainless steel. •...

カタログの3ページ目を開く
Wafer Cassette - 4

Palbam Class WAFER CASSETTE PCPC0207 8 Inch round wafers H bar 25 wafer slots Additional handles Modeled on specific plastic cassette Robotic or push transfer loading

カタログの4ページ目を開く
Wafer Cassette - 5

Palbam Class WAFER CASSETTE 8" - 200mm BAKE CASSETTES - Without H Bar We offer custom designs to fit your dimensions HANDLE 6" AND 8"

カタログの5ページ目を開く
Wafer Cassette - 6

Palbam Class WAFER CASSETTE SEMI Standard E-57 compatible.

カタログの6ページ目を開く

Palbam Classのすべてのカタログと技術パンフレット

  1. Product Catalog 2018

    88 ページ

  2. Workstations

    15 ページ

  3. cleanroom carts

    4 ページ

  4. Tool Carts

    1 ページ

  5. Dispenser

    1 ページ

  6. Storage

    1 ページ

  7. 8” WIP Carts

    1 ページ