MICRO-FLOW LEAK TESTING
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Leading air leak testing solutions for your leak test challenges PFEIFFER VACUUM

LEAK TEST INSTRUMENTS Proven and innovative technology With the innovative Micro-Flow technology our leak testers are unique in the industry. The patented Micro-Flow sensors provide leak testing with short cycle times and leading temperature stability. Furthermore our leak testers provide superior sensitivity, robustness and repeatability compared to other air leak testing methods. Our technologies and products are recognized by multiple international Standards as SAE, USP, ASTM. In addition to our Micro-Flow instruments, further connected solutions and services are provided through our...

Industry applications examples Our Micro-Flow leak testers directly measure leak flow, making them versatile solutions that can be applicable to various industries. We thereby can support all of your applications whether you manufacture industrial items, automotive parts, or pharmaceutical products. We’ve helped to increase sensitivity and resolution accuracy and provide direct measurement with robust, operator independent test solutions. The following information will provide you with further specifications on our products. Please contact our application engineers with more specific...

LEAK TEST INSTRUMENTS Micro-Flow technology (pressure) Micro-Flow technology The heart of the Micro-Flow technology are our Intelligent Gas Leak Sensors (IGLS). The sensors measure flow, pressure and temperature to provide an output that is directly proportional to the leak rate respectively defect size. In pressure regimes above atmospheric conditions, the Micro-Flow sensor is used as described in the pictures on the right hand side. When air leaks from the unit or assembly under test, the emitted air is replenished through the Micro-Flow sensor to maintain a constant pressure. The loss...

Method of Operation – Pressure Test Air leak testing with Micro-Flow sensor at pressure conditions Pressure Reservoir Pressure Reservoir 1 Standby – Pressure Reservoir: P0 – IGLS: no flow 2 Fill – All branches: P0 – IGLS: no flow – UUT: leaks Pressure Reservoir 3 Stabilize – Leak: reduces PUUT – IGLS: begins flow Pressure Reservoir 4 Test – Steady flow thru leak – IGLS: measure flow Basic structure of Micro-Flow set up (example with E2) Orifice Isolation tank Unit under test Precision regulator Cutomer benefits Speed of test – much faster than alternatives, e.g. 25-40% faster compared to...

LEAK TEST INSTRUMENTS Mass Extraction technology (vacuum) Mass Extraction technology A special form of using the Micro-Flow sensor technology is the Mass Extraction technique. The basic principle is similar to the Micro-Flow approach, but in order to achieve higher sensitivity, the test is performed under vacuum conditions. This method incorporates sensor designs that operate at continuum/slip flow condition (shallow vacuum) and transitional/molecular flow regimes (deeper vacuum). This technology can also be used for the leak testing of closed containers such as packages or electronic...

Method of Operation – Mass extraction Air leak testing with Mass Extraction at vacuum conditions Vacuum Reservoir Vacuum Reservoir 1 Standby – Vacuum Reservoir: P0 – IGLS: no flow IGLS 2 Fill – All branches: P0 – IGLS: no flow – UUT: leaks Leak Vacuum Reservoir 3 Stabilize – Leak: increases Pchamber – IGLS: begins flow Vacuum Reservoir 4 Test – Steady flow thru leak – IGLS: measure flow thru leak Basic structure of mass extraction set up (example with VE2) Orifice Precision regulator Precision regulator Mixing tank Unit under test Vacuum pump Customer benefits Especially suitable for sealed...

LEAK TEST INSTRUMENTS Micro-Flow sensors Our Micro-Flow leak testers are providing a unique and superior sensor technology. In comparison to other flow meters, our sensors do not work on the principle of temperature transfer or mechanical movements. Instead the sensors measures flow, pressure and temperature to provide an output that is directly proportional to the leak rate respectively defect size. This ensures a much more stable and robust measurement of the flow rate, which is also much less sensitive to environmental influences like temperature changes. The sensors of our instruments...

Sensor design Pressure leak test instruments and Micro-Flow sensors Vacuum leak test instruments and Micro Extraction sensors Intelligent Molecular Flow Sensor (IMFS) 0 - 1 cc/min 0 - 1 pg/min1) Barometric - 2100 psia / 145 bar abs. 0 - 0.2 psia / 0 - 13 mbar abs. Absolute, capacitance Absolute, capacitance +/- 5% (2% optional) of reading, calibrated range 0 - 10 cc/min 0 - 250 cc/min 2 - 65 psia / 0.15 - 4.5 bar abs. Absolute, micro-machined +/- 2% (1% optional) of reading, calibrated range +/- 2% of reading, calibrated range Intelligent Gas Flow Sensor (IGFS) 0 - 50 l/min 0 - 10,000 l/min...

LEAK TEST INSTRUMENTS – E-PDQ Compact design for Micro-Flow or Mass Extraction E-PDQ is designed for quick production leak testing of small components, ensuring that products meet their leak tightness requirements. The compact design is perfect for system integration. It is available as EQ for pressure applications and MQ for vacuum applications. Customer benefits Compact design – easy integration Integrated pressure (respectively vacuum) reservoir – simple test setup Cost efficient – fast return on investment Solution example Multi-Stations Leak and Flow Test System for the Life Science...

Applicable Micro-Flow sensors IL2-M, IL2-KM Leak rates / sensitivity 0.03 cc/min and higher Pressure ranges > 14.5 psia / 1 bar abs. 2 psia / 0.138 bar abs. Dimensions Gases Pneumatic connections Digital inputs Digital outputs Analog outputs Power supply Interfaces 4" W x 6.25" H x 10" D / 102 x 159 x 254 mm (does not include connections and fittings) Dry, clean gases air, nitrogen (further gases detectable) Test port '/s inch Swagelok®, air/vacuum supply % inch Swagelok® 5-30 V DC, Opto-Isolated for start, stop, test type, remote pressure switch 5-30 V DC, Opto-isolated for pass, fail,...