AutoMET AFM Software Enhanced Nanoscale Automation for Dimension Systems Bruker’s AutoMET™ software brings high-volume, precise AFM measurements to demanding production environments. Available for Dimension FastScan® and Dimension Icon® systems, AutoMET uniquely enables the combination of high-resolution AFM imaging with fast, automated metrology. It provides exceptional ease of use and adaptability for critical-to-quality measurements in production, QA/QC, or other high-volume measurement applications. AutoMET includes an intuitive and simple recipe-writing environment that makes it extremely easy to reduce complex measurement routines to simple, push-button operations. Operators of all experience levels can obtain detailed, accurate measurements on thousands of samples by running pre-defined recipes. Innovation with Integrity AutoMET enables: User-defined automated nanoscale measurements at user-defined locations on data storage slider samples and bare and patterned wafers up to 300 millimeters Optical image pattern recognition and SPMZoom™, tip-centering, full-wafer or grid-mapping support, and image-placement accuracy within tens of nanometers Comprehensive yet simple recipe writing for advanced users Easy setup to align sample to probe and to perform alignment corrections Run Recipe mode to perform complex measurements on thousands of samples easily using a predefined recipe Atomic Force Microscopy

Greater Measurement Flexibility Available for Dimension FastScan®, Icon®, 200-millimeter, and 300-millimeter AFM platforms, AutoMET automation extends the unique capabilities of each system: AutoMET offers two sample measurement layout configurations: a grid-based layout that uses columns and rows for a rectangular or square scan areas and user-defined measurement locations; and a wafer-based layout that lets the user define wafer sizes and precise X,Y measurement locations within the wafer. AutoMET provides great flexibility in sample type, measurement settings, number of measurements, scan...