Catalog excerpts
L>O Dektak XTL Stylus Profiler System • Gage-Capable QA/QC Profiling for Optimal 300mm Performance Stylus Microscopy Innovation with Integrity
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Dektak XTL Stylus Profiler System Bruker’s new Dektak XTL™ stylus profiler accommodates samples up to 350mm x 350mm, bringing legendary Dektak® repeatability and reproducibility to large-format wafer and panel manufacturing. The Dektak XTL features a small footprint with pneumatic passive isolation and a fully enclosed workstation with a wide, easily accessible interlocking door, making it ideal for today’s demanding production floor environments. Its dual-camera architecture enables enhanced spatial awareness, and its high level of automation maximizes manufacturing Though fully optimized...
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Industry's Best Automation and Analysis Software New software features make the Dektak XTL the most powerful, easiest to use stylus profiler available. The system utilizes Vision64 software that is fully compatible with Bruker's optical profiler line. The Vision64 software enables unlimited measurement sites, 3D mapping, and highly customized characterization with hundreds of built-in analysis tools. Also use Vision Microform software to measure shapes such as radius of curvature. Use pattern recognition to minimize operator error and enhance measurement location accuracy. Data collection...
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Critical Results for Large-Format Applications With its unique combination of superior performance and ease of use, the Dektak XTL is the new QA/QC and research standard for industrial thin film deposition monitoring in touch-panel, solar, flat panel display, and semiconductor industries. Wafer Applications: - Step height for deposited thin films (metals, organics) - Step height for resists (soft film materials) - Etching rate determinations - Chemical mechanical polishing (erosion, dishing, bow) Large Substrate Applications: - Printed circuit boards (bumps, step heights) - Window coatings...
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