PMF2000 Series MASS AIR FLOW SENSOR posifaImicrosystems DESCRIPTION PMF2000 features Posifa’s third-generation thermal flow die, benefiting from the latest innovations in microfabrication. The sensor die uses a pair of thermopiles to detect changes in temperature gradient caused by mass flow, delivering excellent signal-to-noise, and unsurpassed repeatability. The “solid state" thermal isolation structure on the sensor die eliminates the need for surface cavity or fragile membrane used in competing technologies, making the sensor resistant to clogging and pressure shock. The PMF2000 series includes an analog version PMF2000V and a digital version PMF2000D that supports the I2C protocol. The supported flow rate ranges from 10 sccm to 10 SLM. The sensors are temperature compensated over the temperature range of 0 to 50 °C. The linearized output provides maximum flexibility and ease-of-use. APPLICATIONS • Oxygen concentrators • Nebulizers • CPAP equipment • Leak detection • Spectroscopy • Mass flow controller • Fuel cell control • Environmental monitoring FEATURES • Unsurpassed performance in a robust and cost effective package • “Solid state" sensing core (no surface cavity or fragile membrane) resistant to clogging and pressure shock • Highly accurate (4% reading typ.) • Fast response time (5 ms typ.) • Linear output and temperature compensation • Long-term stability with minimal null drift MAXIMUM RATINGS • Operating Temperature: -25 to 85 °C • Calibrated Temperature Range: 0 to 50 °C • Storage Temperature: -40 to 90 °C • Humidity: 0 to 100% RH, non-condensing • Shock: 100 g peak (5 drops, 3 axis) • Common Mode Pressure: 25 psi 1925 ZANKER ROAD | SAN JOSE CA 95112 | USA TEL. +1-650-646-5788 WWW.POSIFAMICROSYSTEMS.COM | EMAIL: INFO@POS

PMF2000 Series MASS AIR FLOW SENSOR 1. SLM: standard liter per minute. Standard conditions: 0 °C and 1 atmosphere. 2. V refers to the analog version of PMF2000, and D refers to the digital I2C version. 3. Maximum deviation in output from nominal over the entire calibrated flow range and temperature range. Errors include offset, full scale span, linearity, flow hysteresis, repeatability and temperature effects over the compensated temperature range. 4. 10% to 90% rise time of the flow sensor to electrically respond to any mass flow change. May be affected by the pneumatic interface. 1925 ZANKER...

PMF2000 Series MASS AIR FLOW SENSOR LINEAR OUTPUT For PMF2000V Flow Rate = [(Vout - 1 V) / 4 V] x Full Scale Flow Rate For example, for PMF2101V full scale flow rate is 200 sccm. When Vout reads 3 V, the Flow Rate is: [(3 V - 1 V)/4V x 200 sccm] =100 sccm For PMF2000D Flow Rate = [(Count - 256) / 15868] x Full Scale Flow Rate For example, for PMF2101D full scale rate is 200 sccm. When digital output reads 10000, the Flow Rate is: [(10000 - 256)/15868 x 200 sccm] = 122.81 sccm 1925 ZANKER ROAD | SAN JOSE CA 95112 | USA TEL. +1-650-646-5788 WWW.POSIFAMICROSYSTEMS.COM | EMAIL: [email protected]...

PMF2000 Series MASS AIR FLOW SENSOR posifa Imicrosystems 1925 ZANKER ROAD | SAN JOSE CA 95112 | USA TEL. +1-650-646-5788 WWW.POSIFAMICROSYSTEMS.COM | EMAIL: [email protected]

PMF2000 Series MASS AIR FLOW SENSOR posifa Imicrosystems 1925 ZANKER ROAD | SAN JOSE CA 95112 | USA TEL. +1-650-646-5788 WWW.POSIFAMICROSYSTEMS.COM | EMAIL: [email protected]