posifa Imicrosystems PMF5000 Series MASS AIR FLOW SENSOR FOR MEDICAL DEVICES DESCRIPTION Posifa designed the PMF5000 series of mass air flow sensors specifically for portable medical devices. The sensor is fast and accurate, enabling the precise amount of gas to be delivered in a pulse mode. The sensor’s small footprint fits nicely inside a space-constrained housing. The push-to-connect fittings supports efficient assembly. The flow direction (forward or backward) can be customized to work with an existing system layout. PMF5000 features Posifa’s third-generation thermal flow die, benefiting from the latest innovations in microfabrication. The sensor die uses a pair of thermopiles to detect changes in temperature gradient caused by mass flow, delivering excellent signal-to-noise, and unsurpassed repeatability. The “solid state” thermal isolation structure on the sensor die eliminates the need for surface cavity or fragile membrane used in competing technologies, making the sensor resistant to clogging and pressure shock. The PMF5000 series includes an analog version PMF5000V and a digital version PMF5000D that supports the I2C protocol. The PMF5000 series is a proven product that has been used in quantity in FAA approved, FDA cleared, and CE certified medical devices. MAXIMUM RATINGS • Operating Temperature: -25 to 85 °C • Calibrated Temperature Range: 0 to 50 °C • Storage Temperature: -40 to 90 °C • Humidity: 0 to 100% RH, non-condensing • Shock: 100 g peak (5 drops, 3 axis) • Common Mode Pressure: 25 psi FEATURES • Unsurpassed performance in a robust and cost effective package • “Solid state” sensing core (no surface cavity or fragile membrane) resistant to clogging and pressure shock • Highly accurate (4% reading typ.) • Fast response time (5 ms typ.) • Linear output and temperature compensation • Long-term stability with minimal null drift • Push-to-connect fittings • Flow direction can be changed (forward or backward) per customer request • Analog or digital I2C output • Proven in FAA approved, FDA cleared. and CE certified medical devices 1925 ZANKER ROAD | SAN JOSE CA 95112 | USA TEL. +1-650-646-5788 WWW.POSIFAMICROSYSTEMS.COM | EMAIL: INFO@POSIFA

PMF5000 Series MASS AIR FLOW SENSOR FOR MEDICAL DEVICES 1. SLM: standard liter per minute. Standard conditions: 0 °C and 1 atmosphere. 2. V refers to the analog version of PMF5000, and D refers to the digital I2C version. 3. Maximum deviation in output from nominal over the entire calibrated flow range and temperature range. Errors include offset, full scale span, linearity, flow hysteresis, repeatability and temperature effects over the compensated temperature range. 4. 10% to 90% rise time of the flow sensor to electrically respond to any mass flow change. May be affected by the pneumatic...

posifa Imicrosystems PMF5000 Series MASS AIR FLOW SENSOR FOR MEDICAL DEVICES For PMF5000V Flow Rate = [(Vout - 1 V) / 4 V] x Full Scale Flow Rate For example, for PMF5006V full scale flow rate is 15 SLM. When Vout reads 3 V, the Flow Rate is: [(3 V - 1 V)/4V x 15 SLM] =7.5 SLM For PMF5000D Flow Rate = [(Count - 256) / 15868] x Full Scale Flow Rate For example, for PMF5006V full scale rate is 15 SLM. When digital output reads 10000, the Flow Rate is: [(10000 - 256)/15868 x 15 SLM] = 9.21 SLM 1925 ZANKER ROAD | SAN JOSE CA 95112 | USA TEL. +1-650-646-5788 WWW.POSIFAMICROSYSTEMS.COM | EMAIL: [email protected]...

posifa Imicrosystems PMF5000 Series MASS AIR FLOW SENSOR FOR MEDICAL DEVICES 1925 ZANKER ROAD | SAN JOSE CA 95112 | USA TEL. +1-650-646-5788 WWW.POSIFAMICROSYSTEMS.COM | EMAIL: [email protected]

posifa Imicrosystems PMF5000 Series MASS AIR FLOW SENSOR FOR MEDICAL DEVICES Note: Please use suffix -IN or -MM to indicated desired tubing dimensions. -IN is for 1/4 OD tubing, and -MM for 6mm OD tubing. 1925 ZANKER ROAD | SAN JOSE CA 95112 | USA TEL. +1-650-646-5788 WWW.POSIFAMICROSYSTEMS.COM | EMAIL: [email protected]