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Femto

Product catalog summary

Overview: The document provides technical specifications for Femto low-pressure plasma systems used for cleaning, activation, etching, and coating. These systems are available in both table-top and stand-alone configurations.

Specifications:

Cabinet Dimensions: Table-top systems have a width of approximately 310-560 mm, depth of 420-600 mm, and height of 330-860 mm. Stand-alone systems have a width of 600 mm, depth of 800 mm, and height of 1700 mm.
Chamber Volume: Ranges from approximately 1.9 to 6 liters.
Power Supply: Table-top systems require 230 V AC, while stand-alone systems require 400 V AC with 3 phases.

Vacuum Chambers:

Materials: Stainless steel, aluminum, quartz glass (UHP), and borosilicate glass (UHP).
Shapes and Sizes: Round and rectangular options with various dimensions, including round chambers with diameters of 95-110 mm and lengths of 280-600 mm.

Control Systems:

Semi-automatic control options include PCCE-control (Microsoft Windows CE), PC-control (Microsoft Windows POS Ready 2009), and rotary switch control.

Generator Frequency and Power:

40 kHz with power options of 0-100 W and 0-1000 W.
100 kHz with 500 W power.
80 kHz with 1000 W power.
13.56 MHz with 0-200 W power.
2.45 GHz with power options of 0-100 W and 0-300 W.
All generators are continuously adjustable from 0-100%.

Catalog excerpts

Femto Niederdruck Plasma Systeme Low pressure plasma systemst. for plasma cleaning, activate, etching and coating

Open the catalog to page 1

Niederdruck Plasma Systeme Low pressure plasma systems Technische Daten Gehause Tischgerat Breite ca. 310 - 560 mm Tiefe ca. 420 - 600 mm (570 - 750 mm inkl. Stecker) Hohe ca. 330 - 860 mm Standgerat Breite ca. 600 mm (750 mm inkl. Stecker) Tiefe ca. 800 mm Hohe ca. 1700 mm Kammervolumen Ca. 1,9 - 6 Liter Spannungsversorgung 230 V fur Tischgerat, 400 V / 3 Phasen fur Standgerat Vakuumkammern Edelstahl Rund mit Deckel 0 100 mm, L 278 mm oder 600 mm Rechteckig, Tur mit Scharnier B 103 mm, T 285 mm, H 103 mm Aluminium Rechteckig, Tur mit Scharnier 0 110 mm x 120 mm, L 280 mm oder 600 mm) Quarzglas...

Open the catalog to page 2