Nano - for plasma cleaning, activation, etching and coating

Product catalog summary

Overview: This document provides technical specifications for low-pressure plasma systems used for cleaning, activation, etching, and coating. The systems are available in table-top and stand-alone configurations.

Cabinet Dimensions:

Table Top: Width: approx. 560 mm (22"), Depth: approx. 600 mm (23.6"), Height: approx. 600 - 860 mm (23.6" - 33.9").
Stand Alone: Width: approx. 600 mm (23.6"), Depth: approx. 800 mm (31.5"), Height: approx. 1700 mm (66.9").

Chamber Volume: Approximately 18 - 36 Litres.

Power Supply:

230 V AC for table-top systems.
400 V AC/3 phases for stand-alone systems.

Vacuum Chambers:

Stainless Steel: Round with cover or rectangular with hinged door.
Aluminium: Round with hinged door.
Quartz Glass (UHP): Round with cover or hinged door.
Borosilicate Glass (UHP): Round with cover or hinged door.

Control Systems:

Semi-automatic with PCCE-control (Microsoft Windows CE).
PC-control (Microsoft Windows POS Ready 2009).
Rotary switch control.

Generator Frequency and Power:

100 kHz, 500 W
80 kHz, 1000 W
13.56 MHz, 0 - 100 W; 0 - 300 W
2.45 GHz, 0 - 600 W

All generators are continuously adjustable from 0 - 100%.

Catalog excerpts

Nano - for plasma cleaning, activation, etching and coating-1

iederdruck Plasma SystemeLow pressure plasma systems for plasma cleaning, activation, etching and coating

Open the catalog to page 1

Nano - for plasma cleaning, activation, etching and coating-2

Niederdruck Plasma Systeme Low pressure plasma systems Technische Daten Gehause Tischgerat Breite ca. 560 mm Tiefe ca. 600 mm (570 - 750 mm inkl. Stecker) Hohe ca. 600 - 860 mm Standgerat Breite ca. 600 mm (750 mm inkl. Stecker) Tiefe ca. 800 mm Hohe ca. 1700 mm Kammervolumen Ca. 18 - 36 Liter Spannungsversorgung 230 V fur Tischgerat, 400 V / 3 Phasen fur Standgerat Vakuumkammern Edelstahl Rund mit Deckel 0 267 mm, L 420 mm oder 600 mm Rechteckig, Tur mit Scharnier B 240 mm x H 240 mm x T 420 mm oder 600 mm Aluminium Rechteckig, Tur mit Scharnier 0 240 mm x 240 mm, L 420 mm oder 600 mm Quarzglas...

Open the catalog to page 2

All Diener electronic catalogs and technical brochures

Archived catalogs

NANO
2 Pages