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Tetra 100

Product catalog summary

Overview: The Tetra 100 is a low-pressure plasma system designed for applications such as plasma cleaning, activation, etching, and coating. It features a robust design suitable for industrial use.

Specifications:

Cabinet Dimensions: Width: approx. 600 mm (23.6"), Height: approx. 1700 - 2100 mm (66.9" - 82.7"), Depth: approx. 800 mm (31.5"), Weight: approx. 200-300 kg (without pump).
Vacuum Chambers: Available in stainless steel round and rectangular designs with hinged doors. Round chamber diameter: approx. 400 mm (15.8"), length: approx. 625 mm (24.6"). Rectangular chamber dimensions: Width: 400 mm, Height: 400 mm, Depth: 625 mm. Chamber volume: approx. 80 - 100 liters.
Gas Connections: Equipped with a Mass Flow Controller (MFC).
Generator Frequency and Power: 80 kHz with 1000 or 3000 W, 13.56 MHz with 0 - 300 W, 0 - 600 W, or 0 - 1000 W, 2.45 GHz with 0 - 1200 W. All generators are continuously adjustable from 0 - 100%.
Electrodes: Available in single or multiple levels with RIE electrodes featuring a gas shower.
Hardware Control: Options include PCCE-control (Microsoft Windows CE) and PC-control (Microsoft Windows 10 IoT).
Pressure Measurement: Utilizes Pirani and Capacitance Manometer for corrosive gas versions.
Power Supply: 400 V / 3 Phases.
Vacuum Pump: Available in different sizes and from various manufacturers, with optional activated carbon filter.

Applications: The system is suitable for various industrial applications requiring precise plasma processing capabilities.

Catalog excerpts

Tetra 100lederdruck asma Svsteme ow pressure plasma systems for plasma cleaning, activation, etching and coating

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Niederdruck Plasma Systeme Low pressure plasma systems Technische Daten Abmessungen Gehause (19" Rack) (mit Anschlussen) Breite ca. 600 mm Hohe ca. 1700 - 2100 mm Tiefe ca. 800 mm Gewicht ca. 200-300 kg (ohne Pumpe) Vakuumkammern Edelstahl rund, Tur mit Scharnier Durchmesser ca. 400 mm Lange ca. 625 mm Edelstahl rechteckig, Tur mit Scharnier Breite ca. 400 mm Hohe 400 mm Tiefe 625 mm Kammervolumen Ca. 80 - 100 l Gaszufuhrung Mass Flow Controller (MFC) Generator Frequenz 80 kHz Leistung 1000 oder 3000 W 13,56 MHz Leistung 0 - 300 W; 0 - 600 W; 0 - 1000 W 2,45 GHz Leistung 0 - 1200 W Alle Generatoren...

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