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Tetra 30

Product catalog summary

Overview: The Tetra 30 is a low-pressure plasma system designed for applications such as plasma cleaning, activation, etching, and coating. It features a robust design suitable for industrial use.

Specifications:

Cabinet Dimensions: The system is housed in a 19" rack with dimensions approximately 600 mm in width, 1700 mm in height, and 800 mm in depth. The weight is approximately 250 kg without the pump.
Vacuum Chambers: Made from stainless steel or aluminum, the chambers are rectangular with a hinged door. Dimensions are approximately 305 mm in width, 300 mm in height, and 370 or 625 mm in depth, with a volume of 34 to 57 liters.
Gas Connections: Equipped with a Mass Flow Controller (MFC) for precise gas management.
Generator Frequency: Offers multiple frequency options: 80 kHz with power options of 1000 W or 3000 W, 13.56 MHz with power options of 0-300 W or 0-600 W, and 2.45 GHz with power options of 0-600 W or 0-1200 W. All generators are adjustable from 0 to 100%.
Electrodes: Available in single or multiple levels, including RIE electrodes with a gas shower.
Hardware Control: Features PCCE-control using Microsoft Windows CE and PC-control using Microsoft Windows 10 IoT.
Pressure Measurement: Utilizes Pirani and Capacitance Manometer for corrosive gas versions.
Power Supply: Operates on 230 or 400 V with 3 phases.
Vacuum Pump: Available in various sizes and from different manufacturers, with options for an activated carbon filter.

Applications: The Tetra 30 is suitable for a range of industrial applications requiring precise plasma processing capabilities.

Catalog excerpts

Tetra 30lederdruckasma ow pressure plasma systems for plasma cleaning, activation, etching and coating

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Niederdruck Plasma Systeme Low pressure plasma systems Technische Daten Abmessungen Gehause (19" Rack) (mit Anschlussen) Breite ca. 600 mm Hohe ca. 1700 mm Tiefe ca. 800 mm Gewicht ca. 250 kg (ohne Pumpe) Vakuumkammern Edelstahl oder Aluminium Rechteckig, Tur mit Scharnier Breite ca. 305 mm Hohe ca. 300 mm Tiefe ca. 370 oder 625 mm Kammervolumen Ca. 34 l - 57 l Gaszufuhrung Mass Flow Controller (MFC) Generator Frequenzen 80 kHz Leistung 1000 W oder 3000 W 13,56 MHz Leistung 0 - 300 W; 0 - 600 W 2,45 GHz Leistung 0 - 600 W; 0 - 1200 W Alle Generatoren sind stufenlos regelbar von 0 - 100 % Elektroden...

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