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Zepto

Product catalog summary

Overview: The document provides technical specifications for Zepto low-pressure plasma systems, designed for applications such as plasma cleaning, activation, etching, and coating. These systems are marketed as low-cost and budget-friendly options.

Specifications:

Weight: Approximately 15 kg (33 lbs) without the pump.
Vacuum Chamber: Available in quartz glass or borosilicate glass, both with a diameter of 105 mm (4.1 inches) and lengths of either 200 mm (7.9 inches) or 300 mm (11.8 inches). An alternative W6 chamber has a diameter of 160 mm (6.3 inches) and a length of 180 mm (7.1 inches).
Chamber Volume: Ranges from approximately 1.7 to 2.6 liters.
Gas Connection: Equipped with needle valves and mass flow controllers (MFCs).
Generator Frequency: Options include 40 kHz with power ranging from 0 to 100 W, and 13.56 MHz with power ranging from 0 to 200 W.
Electrodes: RIE electrodes with a gas shower configuration.

Control Options:

Manual control.
PCCE-control using Microsoft Windows CE.
PC-control using Microsoft Windows POS Ready 2009.
Rotary switch control.

Power Supply: Operates on 230 V.

Additional Features:

Includes one product carrier for partial recording.
Pressure measurement option available with Pirani gauge.

Catalog excerpts

Zepto (Low Cost / Low Budget) Niederdruck Plasma Systeme Low pressure plasma systems for plasma cleaning, activation, etching and coating

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LGpiU (Low Cost / Low Budget] Niederdruck Plasma Systeme Low pressure plasma systems Technische Daten Gewicht Ca. 15 kg (ohne Pumpe) Vakuumkammern Quarzglas (UHP) rund mit Deckel Durchmesser 105 mm Lange 200 mm oder 300 mm Borosilikatglas (UHP) rund mit Deckel Durchmesser 105 mm Lange 200 mm oder 300 mm W6 Durchmesser 160 mm Lange 180 mm Kammervolumen Ca. 1,7 - 2,6 Liter Gaszufuhrung Nadelventile Mass Flow Controller (MFCs) Generator Frequenz 40 kHz Leistung 0 - 100 W 13,56 MHz Leistung 0 - 200 W Elektroden Ein Elektrodenpaar auBerhalb der Vakuumkammer Steuerung Manuell PCCE-Steuerung (Microsoft...

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