MASS FLOW CONTROLLER
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MASS FLOW CONTROLLER

MASS FLOW CONTROLLER PROGRAM WORLD LEADER IN FLOW TECHNOLOGY FOR OVER 35 YEARS With AERA® and SAM® Mass Flow Controllers these product ranges apply as a world leader in flow technology for over 35 years. The success is based on many properties that were in charge of developing MFC: A fast, repeatable, accurate, reliable, field-proven technology; absolute and differential pressure control, enabling stable process control; last but not least multi-gas, multi-range, pressureinsensitive and live-gas certified MFCs. Our customers, often market leaders in their industry, verify the top quality of...

ULTIMATE TECHNOLOGY NOW DESIGNED TO PLAY A MAJOR ROLE IN NEXT GENERATION OF CONTROLLERS MFC QUALITY AND PRECISION ACCURACY - REPEATABILITY - HIGH LEAK INTEGRITY - TEMPERATURE STABILITY - LOW ZERO DRIFT - SPEED AERA® and SAM® Mass Flow Controllers enjoy a well deserved reputation from globally recognized customers. They are valued as a premium performance design. Advanced products have been developed in close contact with our customer’s needs for functions meeting or even exceeding the next generation of requirements of high performance and highest product quality: Multi-Range and Multi-Gas...

SOFTWARE / CONTROL CONTROL - CONSOLES - CONNECTORS Depending on the model, the set point value and actual value signals can be predefined and fed back either by analog or digital communication: analog via standard signal interface or digital via RS232/RS-422 or field bus interface (Profibus, Device Net, Ethernet). The digital RS-232 or RS-422 interface is required for communication with the Mass Flow Controller software (device dependent). The microprocessor controlled electronics provide significant benefits: they reduce drift and offset occurrences of the components and enable...

IMPLEMENTED FUNCTIONS PRESSURE INSENSITIVE FUNCTION The PI (Pressure Insensitive) function improves the controllers ability to tolerate variations in the primary pressure. This function improves durability and is currently highly desired in mass flow controllers. Upstream gas supply pressure changes may cause ordinary mass flow controllers to fluctuate in pressure because the MFC tries to maintain control as it detects pressure change at the flow rate sensor. Therefore, any current mass flow controller, without this regulator, is directly influenced by fluctuation in the gas supply inlet...

Construction: Integrates a miniature solenoid driven penumatic valve (normally open). Operation: Shuts off the gas inlet completely when set to 0 % or when connected to a close fully input signal Dead volume 0.25 ccm (appr. 1/10 of a standard^C) Diaphragm valve Minature pneumatic valve Pneumatic valve operation air: 0.4 to 0.7 MPa The major purpose of the valve-shut-off function is to reduce the gas purge time that is required to vent residual gas in the space between the downstream pneumatic valve and the mass flow controller valve. The ordinary flow rate control valve installed in a mass...

ANALOG MASS FLOW CONTROLLER FC-R7700 DIGITAL/ANALOG MASS FLOW CONTROLLER FC-DR980 Precise, economical, elastomer-sealed design. As the field-proven standard for a range of applications, AERA® FC-R7700 series delivers precise flow control, while offering the economic benefits of elastomer seals. Leading digital Multi-Gas/Multi-Range MFC, providing superior versatility in various systems. AERA® FC-DR980 series deliver performance excellence and operational versatility, resulting in significant cost savings and ease of use. FEATURES >> Elastomer seals >> VCR® , VCO®, and Swagelok® compatible...

DIGITAL/ANALOG MASS FLOW CONTROLLER TRANSFORMER DIGITAL/ANALOG MASS FLOW CONTROLLER FC-PI 980 Transforms your process with greater flexibility and lower cost of ownership. Suitable for a variety of applications, including CVD, PVD, diffusion and etch, TRANSFORMER mass flow controllers (MFCs) and mass flow meters (MFMs) will transform your process, providing superior flexibility and efficiency for improved yield, higher productivity, and lower cost of ownership. Next-generation PI technology for tomorrow’s manufacturing demands. With industry-leading flow control technology, AERA® PI-980...

MFC SERIES AERA®OVERVIEW MASS FLOW CONTROLLERS Model FC-PI 980 Type Short Functions Control modes Specialties Flow range Normal operating pressure Response time Accuracy Stability Repeatability Sealing Leak integrity Connections Control valve Alarm and diagnostics Easy integration Analog 0 - 5V / Ethernet, DeviceNet™ and RS485 Pressure insensitive. Superior real-time process control. Real time communication and control. Live gas certified. 0,005 - 100 SLM 7 bar / 100 psi < 1 sec < 0,25% FS/ 1% of SP** Superior < 0,5 % of FS < 0,25 % of FS Metal design 1x10'10 atm-cc/sec of He VCR®, IGS (C...

MFC SERIES SAM® DIGITAL/ANALOG MASS FLOW CONTROLLERS SERIES SFC-F SFC-F is the basic series of compact digital MFCs. FEATURES >> Diaphragm direct sealing valve >> Original digital control method >> High accuracy by digital multi-point calibration >> High accuracy at low flow set-points >> Long-time stability of zero >> Minimized dead space >> No need to switch gas piping >> A wealth of data resources available >> Very low differential pressure < 10 Torr available >> Simple valve structure allows high Cv-value reserve despite compact dimensions BENEFITS >> Outstanding control characteristics...

SFC-1480F Series is a basic series of compact digital Mass Flow Controllers offering very low flow. SFC-1580/1680F series is the high temperature version of compact digital Mass Flow Controllers. FEATURES >> Very fast response < 0,7-1,2 sec flow settling time >> Metal / rubber seals >> Flow 1 SCCM - 20 SLM (12 models available) >> Leak integrity < 1x10-11Pa m3/s He (Viton 10-8) FEATURES >> Higher operating temperature 150 °C >> Built-in structure to prevent recondensation >> Fast response < 1 sec flow settling time >> Metal seals >> Flow 10 SCCM - 30 SLM (14 models available) >> Leak...