MFC CATALOGUE
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MAss flow controller

Mass flow controller program World leader in flow technology for over 35 years With AERA® and SAM® Mass Flow Controllers these product ranges apply as a world leader in flow technology for over 35 years. The success is based on many properties that were in charge of developing MFC: A fast, repeatable, accurate, reliable, field-proven technology; absolute and differential pressure control, enabling stable process control; last but not least multi-gas, multi-range, pressure-insensitive and live-gas certified MFCs. Our customers, often market leaders in their industry, verify the top quality...

Ultimate Technology Now designed to play a major role in next generation of controllers MFC Quality and Precision accuracy - Repeatability - High leak integrity - temperature stability - low zero drift - Speed AERA® and SAM® Mass Flow Controllers enjoy a well deserved reputation from globally recognized customers. They are valued as a premium performance design. Advanced products have been developed in close contact with our customer’s needs for functions meeting or even exceeding the next generation of requirements of high performance and highest product quality: Multi-Range and Multi- Gas...

Software / control Control - Consoles - Connectors Depending on the model, the set point value and actual value signals can be predefined and fed back either by analog or digital communication: analog via standard signal interface or digital via RS-232/RS-422 or field bus interface (Profibus, Device Net, Ethernet). The digital RS-232 or RS-422 interface is required for communication with the Mass Flow Controller software (device dependent). The microprocessor controlled electronics provide significant benefits: they reduce drift and offset occurrences of the components and enable...

Implemented Functions Pressure Insensitive Function PI Benefits The PI (Pressure Insensitive) function improves the controller‘s ability to tolerate ● Smaller fluctuations in the actual flow rate variations in the primary pressure. This function improves durability and is currently ● More stable gas flow to the chamber improves process results and yield highly desired in mass flow controllers. ● Faster response enables new processes and faster throughput Upstream gas supply pressure changes may cause ordinary mass flow controllers to fluctuate in pressure because the MFC tries to maintain...

Implemented Functions Valve Shut-off Function Construction: Integrates a miniature solenoid driven penumatic valve (normally open). Available only for series The major purpose of the valve-shut-off function is to reduce the gas purge time that is required to vent residual gas in the space between the downstream pneumatic valve and the mass flow controller valve. The ordinary flow rate control valve installed in a mass flow controller cannot shut-off the gas completely. In order to overcome this problem, a valve is integrated near the downstream flow rate control valve, to enable the Valve...

MFC Series AERA® Analog Mass Flow Controller FC-R7700 Highlights Precise, economical, elastomer-sealed design. As the field-proven standard for a range of applications, AERA® FC-R7700 series delivers precise flow control, while offering the economic benefits of elastomer seals. Features ● Elastomer seals ● VCR® , VCO®, and Swagelok® compatible connections ● Full-scale flow ranges from 10 SCCM to 200 slm ● Normally-closed or normally open solenoid control valve ● Leak integrity of 1x10 -6 atm-cc/sec of He For process and equipment engineers working in the semiconductor, flat panel display,...

MFC Series AERA® Digital/Analog Mass Flow Controller TRANSFORMER Transforms your process with greater flexibility and lower cost of ownership. Implemented Functions Suitable for a variety of applications, including CVD, PVD, diffusion and etch, Transformer mass flow controllers (MFCs) and mass flow meters (MFMs) will transform your process, providing superior flexibility and efficiency for improved yield, higher productivity, and lower cost of ownership. Highlights Advanced sensor and valve technology, field-proven platform components and high-speed, digital circuitry deliver very precise...

MFC Series AERA® Overview Mass Flow Controllers Model Precise, economical, elastomer-sealed design Precise, reliable, metal-sealed design Providing superior versatility in various systems Transform your processes with greater flexibility and lower cost of ownership Next-generation PI technology for tomorrow’s manufacturing demands Analog 0 - 5V / Ethernet, DeviceNet™ and RS485 Corrosion resistant design. Superior results - high-quality thin-film characteristics. Multiple alarm & diagnostic capabilities. Multi-gas, multi-range, multi-mode. Field programmable. Wide range of gases without...

MFC Series SAM® Digital/Analog Mass Flow Controllers series SFC-F SFC-F is the basic series of compact digital MFCs. Features ● Diaphragm direct sealing valve ● Original digital control method ● High accuracy by digital multi-point calibration ● High accuracy at low flow set-points ● Long-time stability of zero ● Minimized dead space ● No need to switch gas piping ● A wealth of data resources available ● Very low differential pressure < 10 Torr available ● Simple valve structure allows high Cv-value reserve despite compact dimensions Benefits ● Outstanding control characteristics ● Large...

MFC Series SAM® Series SFC-1480F SFC-1480F Series is a basic series of compact digital Mass Flow Controllers offering very low flow. Features ● Very fast response < 0,7-1,2 sec flow settling time ● Metal / rubber seals ● Flow 1 SCCM - 20 SLM (12 models available) ● Leak integrity < 1x10 -11Pa m3/s He (Viton 10 -8) ● Monitoring of operation using digital interface is possible ● Minimal particle generation ● Long operation life Series SFC-1580/1680F SFC-1580/1680F series is the high temperature version of compact digital Mass Flow Controllers. Features ● Higher operating temperature 150 °C ●...