FlexSEM 1000II Specifications ■ Specifications Detector/various analyzers Energy dispersive X-ray spectrometer (EDS) Ultra variable-pressure detector (UVD-II) Chamber scope Camera navigation system Specimen stage/holder Multi sample holder SEM data manager Hitachi map 3D Multi Zigzag Control system Trackball Joystick Control panel *1: When the main unit and power box are connected. *2:Magmfication is defined with a display size of 127 mm x 95 mm (4 x 5 picture size). *3:Magmfication is defined with a display size of 509.8 mm x 286.7 mm (1,920 x 1,080 pixels). *5: Rotary pump may not be included with main unit depending on its destination. ^Microsoft® and Windows® are registered trademarks of Microsoft Corporation in U.S.A. and other countries. *Intel® is a registered trademark of Intel Corporation in U.S.A. and other countries. £» Science for a better tomorrow *This logo is a registered trademark of Hitachi High-Technologies Corporation in Japan and other countries. Notice: For correct operation, follow the instruction manual when using the instrument. Specifications in this catalog are subject to change with or without notice, as Hitachi High-Technologies Corporation continues to develop the latest technologies and products for our customers. Copyright (C) Hitachi High-Technologies Corporation 2019 All rights reserved. ^Hitachi High-Technologies Corporation Tokyo, Japanhttps://www.hitachi-hightech.com/jp/science/24-14, Nishi-shimbashi,1-chome, Minato-ku Tokyo, 105-8717, Japan For technical consultation before purchase, please contact:[email protected] MIX Paper (torn responsible sources HTD-E267 2019.1 Scanning Electron Microscope

High performance in a compact system for various metho ds of observations With the highest in-class resolution of 4 nm, the FlexSEM 1000 II offers user-friendly operation and sophisticated automatic functions for a wide range of users, from beginners to experts. ※ Screen shows simulated imege. Specimen: diatom User support function provides prompt observation Wide area W de a re ea observation obse ob serv se rvat rv at on Wide area observation by Multi Zigzag* Advanced performance in a compact body Application gallery Applic icat ation on ga galler ery y Observation examples in various fields...

Fast results with efficient user controls Multiple integrated features for intuitive operation. Specimen holder Automated image corrections for easy operation Extensive user operation support functions ■ Easy operation with use of camera navigation system* Compact design Upgradeable Options for various analytical needs A space and energy saving system with performance comparable to larger scanning electron microscopes Three-Dimensional measurement by Hitachi map 3D Hitachi map 3D is a measurement and three-dimensional model display software package designed for the use with Hitachi SEM images....

High image quality High Hi gh ima mage ma age eq uallity ua ty Advanced performance in a compact body Compact and high-performance electron optics High-contrast observation with the Beam Brightness system Equipped with a low-aberration objective lens, providing high resolution in a compact body. "Beam Brightness" is a system to maintain high-emission FlexSEM 1000 II current regardless of accelerating voltage. With this system, high-contrast images can be obtained continuously, even at low accelerating voltage levels. Emission current Accelerating voltage Accelerating voltage: 20.0 kV, Magnification:...

High-sensitivity semiconductor backscattered electron detector The semiconductor backscatter detector consists of five elements, enabling simultaneous signal collection from each segment. By changing their configuration, the detector takes images which emphasize composition information, shadow images which emphasize topographic information, and 3D images which emphasize both compositional and topographic information. Hitachi map 3D captures all four directional images simultaneously with a high-speed, segmented Backscattered Electron Detector (BSED), supports various measurements such as height,...

Smooth operation Sm Smoo moo ooth th o th pe p e era rattion ra on Improved throughput by easy operation Automatic image corrections which do not require an expert Improved high-speed automatic image correction algorithms shorten latency time by approximately 70% compared with conventional models＊1, realizing high-throughput data acquisition minimizing or eliminating various image adjustments. Before adjustment After adjustment User interface with improved software New graphical user interface supports touchscreen capability for all operations, including stage control and observation conditions....

Easy search Easy y tto o sse ear arch ch ch a field off view fie d o fie view Intuitive searching of a desired field of view by camera navigation system* Wide area W de a re ea observation obse ob serv se rvat rv at on Easy to search a field of view with the integrated camera navigation system Wide area observation by Multi Zigzag* Wide area observation of multiple areas on optical camera image or SEM image Navigate to any location via SEM MAP and quickly reach your observation area simply by clicking on Multi Zigzag (sequential field-of-view image capturing) is a function that generates a low-magnification...

Application Applic icat ation on gallery galler ga ery y Application Examples (uncoated observat ion) Electronic components Accelerating voltage: 10.0 kV, Magnification: 10,000x Accelerating voltage: 15.0 kV, Magnification: 500x(UVD used) Accelerating voltage: 2.0 kV, Magnification: 50x Specimen: semiconductor device Specimen: wire bonding Specimen: metal terminal Accelerating voltage: 5.0 kV, Magnification: 5,000x (Ion milling used) Environmental & energy material Accelerating voltage: 4.2 kV, Magnification: 20,000x Accelerating voltage: 5.0 kV, Magnification: 1,000x (Ion milling used) Accelerating...

Application gallery Applic icat at on ga ller lery y Application Examples (Biological) Wide area observation and EDS analysis Analytical Ana y yttic ica cal al ffunction unctio un ctio ct ion on Life Science ＊ Smooth and quick analysis by using camera navigation system FlexSEM incorporates observation to analysis smoothly by using the camera navigation system in conjunction with EDS. Correlative results from the acquisition of high-resolution SEM images and mapping images from an ultra-wide area can be displayed. 1 mm Accelerating voltage: 8.0 kV, Magnification: 5,000x Specimen: abalone's shell...