Hitachi Ultrahigh-resolution Field-emission Scanning electron microscope HITACHIInspire the IMext SU8600 SCANNING ELECTRON MICROSCOPE Notice: For correct operation, follow the instruction manual when using the instrument. Specifications in this catalog are subject to change with or without notice, as Hitachi High-Tech Corporation continues to develop the latest technologies and products for our customers. Copyright (C) Hitachi High-Tech Corporation 2021 All rights reserved. ^Hitachi High-Tech CorporationTokyo, Japanwww.hitachi-hightech.com/global/science/ vO' Paper from responsible sources

Modern Solutions for a Modern World The SU8600 brings in a new era of Ultrahigh-resolution cold-field emission scanning electron microscopes to the long-standing Hitachi EM line-up. This revolutionary CFE-SEM platform incorporates multifaceted imaging, automation, increased system stability, efficient workflows for users of all experience levels, and more. Enhanced User-Experience with Advanced Automation . Automated alignments increase efficiency and throughput. . Automated data acquisition recipes allow for greater precision as well as repeatability. . High-precision piezo stage* improves navigational...

Electron Optics and Detectors Core Technology（Cold FE Electron Source） From the time that the cold field emission (CFE) electron source was realized in 1972, Hitachi High Tech has constantly improved this outstanding technology for high-resolution electron imaging. The latest developments in electron gun designs yield higher irradiation stability of the electron beam within the high-brightness region. The SU8600 enables high S/N imaging even at low accelerating voltages, and can also be used in long-term measurements and analyses under large current irradiation conditions rivaling other gun technologies...

Automated Workflows Application - Semiconductor - Voltage Contrast Images of 5 nm process SRAM Automated Optics Alignment SEM operation requires optimization of various parameters when conditions, specimen, or analyses change. The SU8600 features an automated alignment function to assist in this procedure. From beam alignment to stigmator alignment, each alignment optimization can be done automatically. Above Left: W contact Layer, acquired at 0.5 kV (UD), Above Right: Co-W contact layer, acquired at 0.3 kV (TD) with deceleration condition. Various conditions such as landing energy, detector...

Application - Material Science - Fine Surface Structure of RHO-type Zeolite Left: RHO-type Zeolite particle at low-kV. In order to reveal fine steps structure on surface, the image was acquired at 0.8 kV of landing voltage. This allows the very fine structure of surface steps to be clearly visible (image on right). Specimen courtesy of Dr. Yoshihiro Kamimura, National Institute of Advanced Industrial Science and Technology (AIST), Japan Application - Life Science - Backscattered electron images above from ultrathin section of Arabidopsis thaliana. Images were acquired at 2 kV of acceleration...

Flexible Interface and Chamber Dual monitors with 6-signal simultaneous display Electron Optics 1, 2, 4 or 6 signals, including the chamber scope(*) or SEM MAP, can be displayed simultaneously on a single monitor. By adding a second screen, the dual-monitor configuration supports enhanced productivity plus expanded workspace and allows the operation panel to be customized with submenus positioned anywhere on either screen. Camera Navigation* Detectors The built-in optical camera captures the specimen holder overview which is automatically transferred to the SEM MAP screen for a graphical navigation...