Hitachi UltraHigh-resolution Field-emission Scanning electron microscope SCANNING ELECTRON MICROSCOPE Science for a better tomorrow

The SU8700 brings in a new era of Ultrahigh-resolution Schottky field emission scanning electron microscopes to the long-standing Hitachi EM line-up. This revolutionary FE-SEM platform incorporates multifaceted imaging, high-probe current, automation, efficient workflows for users of all experience levels, and more.

Key feature of The SU8700Enhanced User-Experience with Advanced Automation■ Automated alignments increase efficiency and throughput. ■ Automated data acquisition recipes allow for greater precision as well as repeatability. ■ High-precision piezo stage* improves navigational and recall accuracy for targeted regions of interest. ultra-fast microanalysis with high probe current. ■ 0.01 kV* imaging capability without stage bias expands the application range for beam sensitive specimens. ■ A multitude of new detectors and options are available to best suit the needs of any user. Dual monitor configuration...

The SU8700 allows for both versatile imaging and demanding analytical capabilities in a single system. ■ Schottky field emitter provides probe current from a few pA to 200 nA, in order to address a large variety of specimens. - Novel electron optics enable very low voltage imaging while still maintaining high image quality - even as low as 0.01 kV* without stage bias. Optimized detection system and chamber design allow short working distance EDS analysis (WD=6 mm) for both imaging and analysis under the same parameters. The new UD is well-suited for fine structure imaging by utilizing superior...

SU8700 Backscatter electron (BSE) imaging is a powerful tool for acquiring compositional information of specimens. The image on the left image shows a Salami structure stabilized by stained ABS resin with the SU8700's MD. The SU8700's MD allows for TEM-like data acquisition and even works at voltages lower than 0.5 kV. The ability to visualize high-quality topographical information is an essential capability for all modern SEM platforms. The SU8700 LD enables acquisition of topographical information with outstanding detail, speed, and definition. The image left on the left reveals surface topographical...

Automated WorkflowsAutomated Optics Alignment SEM operation requires optimization of various parameters when conditions, specimens, or analyses change. The SU8700 features an automated alignment function to assist in this procedure. From beam alignment to stigmator alignment, each alignment optimization can be done automatically. EM Flow Creator * EM Flow Creator" allows users to configure repeatable SEM operation sequences. Various SEM functions can be assembled in EM Flow Creator' s window by drag-and-drop method then saved as a recipe for later use. Once a recipe is configured, automated data...

Application -SemiconductorVoltage Contrast Images of 7 nm process SRAM Voltage contrast in a SEM is a very powerful tool for semiconductor device evaluation. As the device structure changes by layer, SEM conditions such as accelerating voltage and contrast must also be optimized. The SU8700 offers a voltage range down to 0.01 kV*, without stage bias, to address these needs and more. On the left is an image taken at 300 V to demonstrate this VC capability as applied to the analysis of device architecture. The image on the left shows analysis of memory cell structure for 3D NAND. This data clearly...

Application - Material ScienceTempered Martensite in Steel Detailed evaluation of metallic alloys is very important to many industries. The left two images demonstrate the strong capabilities of the SU8700 for such investigations. The precipitates along grain boundaries are clearly visible when acquiring secondary electron images using the UD. Grain size and deformation are easily distinguishable in left-bottom image by acquiring BSE channeling contrast. In addition, crystal defects in some grains can be clearly observed in right-bottom image by using the same method. Nanoparticles Containing...

Application - Life Science -Ultrastructure of Arabidopsis thaliana Backscattered electron images above from ultrathin section of Arabidopsis thaliana. Images were acquired at 2 kV of acceleration voltage to demonstrate TEM-like quality. For Energy Filtered BSE detection, ultrastructure such as thylakoid membrane are clearly visible in right image. Specimen courtesy of Dr. Kiminori Toyooka, RIKEN CSRS Three backscattered electron images from ultrathin section of rat forebrain demonstrate SU8700 image acquisition capability. Top-left image was acquired with >120 pm of FOV. The yellow rectangle...

Multi-Channel image can be displayed on the screen 2, 4 or 6 signals including the chamber scope(*) or SEM MAP image can be displayed simultaneously on a single monitor. The dual-monitor configuration supports enhanced productivity plus expanded workspace and allows the operation panel to be customized with submenus positioned anywhere on either screen, (center) In multi-signal display mode, a saved image can be loaded to a vacant channel and further processed for real-time comparison to live conditions.

Operation assisting GUI The built-in optical camera captures the specimen holder overview and is automatically transferred to the SEM MAP screen for a graphical navigation interface to assist with quick access ROI. GUI integrated chamber scope provides safe operation by showing specimen position in real-time. Monochrome/color convertible and can be displayed on individual window. The specimen exchange chamber accepts large specimens up to 0150 mm diameter. Multiple EDS ports in the improved chamber design offer versatile analytical platform. (The instrument picture includes options)

Schottky Emitter Accelerating Voltage Probe Current Stage Control Specimen Size Variable Pressure (VP) mode (＊2) Pressure Range Step-down Transformer (Option) ※PC Operation table Main unit Movable Range Specimen Stage Secondary Electron Image resolution Electron Optics Standard Detectors Customer supplied item Lower Detector (LD) Option Detectors (＊2) Middle Detector (MD) Semiconductor Type BSED (PD-BSED) Ultra Variable-Pressure Detector (UVD) STEM Detector Energy Dispersive X-ray Spectrometer (EDS) Electron Backscattered Diffraction Detector (EBSD) Image Display Mode Large Screen Display Mode...