ZoneSEM II & ZoneTEM II

ZoneSEM II & ZoneTEM II

ZoneSEM II & ZoneTEM II

Product catalog summary
Introduction
The document discusses the challenges faced by SEM and TEM users due to hydrocarbon contamination during high-resolution imaging. This contamination is primarily caused by gaseous hydrocarbons deposited by the electron beam, often due to a non-optimal chamber vacuum.

Solution Overview
Hitachi offers a solution with their ZONE cleaners for SEM and TEM, which use ultraviolet light and free oxygen radicals for gentle removal of hydrocarbons. This method is less harsh compared to plasma cleaners, reducing the risk of sample alteration or destruction.

Technical Specifications
  • UV lamps with wavelengths of 185nm and 254nm are used to break hydrocarbon bonds and generate ozone.
  • An integrated diaphragm pump creates a moderate vacuum adjustable between 13 and 67kPa.
  • The chamber pressure can be optimized for oxidative or physical cleaning based on the sample type.

Product Features
  • Accommodates up to 5 TEM sample holders, configurable.
  • Includes cleaning and storage functions.
  • Features a recipe memory for process customization.
  • Suitable for samples up to 100mm in diameter and 37mm in height.
  • Typical cleaning process times range from 5 to 15 minutes.

Additional Information
For further guidance and product selection, Hitachi provides expert consultation. More information can be accessed through their website or by contacting them via email.

Legal Notice
This document is the copyright of Hitachi High-Tech Europe GmbH and is intended for general information purposes only. Specifications and designs are subject to change without notice.
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Catalog excerpts

ZoneSEM II & ZoneTEM II-1

Sample Preparation and Cross-Section Preparation

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ZoneSEM II & ZoneTEM II-2

UV-Ozone Sample Cleaner for SEM and TEM ZoneSEM II Product Features - For samples up to 100mm Ø and 37mm high - Cleaning and storage function Gentle removal of hydrocarbon contamination - Recipe memory - Typical process times 5-15 minutes SEM and STEM / TEM users know the problem: High-resolution imaging is often impaired (if not made completely impossible) by the rapid build-up of a carbon film in the observation area. This is usually caused by gaseous hydrocarbons that are continuously deposited during observation due to the energy transfer of the electron beam. The source of these hydrocarbons...

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ZoneSEM II & ZoneTEM II-3

Not sure which product aligns with your needs? Our experts are here to provide guidance and help you make the best choice. Speak with an expert More information This publication is the copyright of Hitachi High-Tech Europe GmbH and provides outline information only, which (unless agreed by the company in writing) may not be used, applied or reproduced for any purpose or form part of any order or contract or regarded as the representation relating to the products or services concerned. The content is provided for general information purposes only. Hitachi High-Tech Europe GmbH’s policy is one...

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