DM3 XL

DM3 XL

DM3 XL

Product catalog summary
Specifications
The DM3 XL inspection system features a sturdy metal stand and offers two focusing options: a 2-gear system with coarse and fine adjustments, and a 3-gear system with coarse, medium, and fine adjustments. The stage stroke is 30 mm. It includes a robust incident light axis with a 4-position reflector turret for various illumination methods such as brightfield (BF), darkfield (DF), polarization (POL), differential interference contrast (DIC), and fluorescence (FLUO). The system supports oblique illumination and includes a Color-coded Diaphragm Assistant (CCDA) and a centerable aperture iris diaphragm. Compatible light sources include LED, halogen, and various fluo-illumination options.
Objective Turret and Objectives
The DM3 XL is equipped with objective turrets that can hold 5x BF/DF M32, 6x BF M25, and 7x BF M25 objectives. It supports HI PLAN EPI, N PLAN EPI, PLAN FLUOTAR, and PLAN APO objectives with magnifications ranging from 0.7x to 150x. Optional accessories include a magnification changer and measuring stages for x, y, and z measurements.
Transmitted Light and Power Supply
Illumination is provided via an external cold light source with light fiber, and the system uses a stabilized universal power supply unit that operates between 90 - 230 V.
Inspection Efficiency
The DM3 XL is designed for high efficiency in inspecting 6” samples, offering a 30% increased field of view with its macro objective. This allows for rapid scanning of large components, enhancing defect detection and process control.
LED Illumination
The system uses ultra-bright, high-power LED illumination with a constant color temperature of 4500 K, providing true-to-life color imaging and a long lifetime of 35,000 hours. It is suitable for all contrast methods and offers significant cost savings and environmental benefits.
Ergonomics and User Interface
The DM3 XL is ergonomically designed to reduce muscle strain and increase productivity. It features easily reachable controls, variable ergotubes, and focus knobs for comfortable operation. The Color Coded Diaphragm Assistant (CCDA) aids in speeding up work and minimizing errors.
Software and Documentation
The system can be upgraded with dedicated software modules like LAS X for high-quality solutions in high-throughput environments. It supports efficient documentation with a range of microscope cameras offering various resolutions and interfaces.
See more

Catalog excerpts

DM3 XL-1

Sturdy metal stand 2-gear focusing (coarse/fine with 1 μm micrometer scale with top focus stop) or 3-gear focusing (coarse/medium/ fine with 1 and 4 μm micrometer scales with top focus stop) Torque coarse focus, adjustable stage height stop FAST DETECTION – FAST ACTION Incident light 04/2017 · Order no.: 11914834 · © 2017 by Leica Microsystems CMS GmbH. Subject to modifications. LEICA and the Leica Logo are registered trademarks of Leica Microsystems IR GmbH. Stage stroke Microelectronics and Semiconductor Industry Robust incident light axis with 4-position reflector turret for BF/DF/POL/DIC and FLUO ›› with oblique illumination ›› with Color-coded Diaphragm Assistant (CCDA) ›› with centreable Aperture iris diaphragm ›› with IL-Filter magazine for 2 filters – Ø 32 mm The following light sources can be adapted to all incident light axes: ›› LED-Lamphousing with internal microscope control of the light intensity for incident light ›› Mirrorhousing 106, for simultaneous adaptation of two light sources ›› Fluo-illumination SFL 100, 4000 and 7000 ›› EL 6000, Hg 50, Hg 100, Xe 75 ›› 12 V 100 W Halogen (Lamp housing series 106 or 107/2) with separate transformer Objective turret/ Objectives 5x BF/DF M32, 6x BF M25 and 7x BF M25 objective turret ›› HI PLAN EPI Objectives 5 x, 10 x, 20 x ›› N PLAN EPI Objectives 2.5 x - 100 x ›› PLAN FLUOTAR Objectives 1.25 x - 100 x ›› PLAN APO Objectives 0,7 x Macro 50 x, 100 x, 150 x Optional magnification changer (1x, 1.5 x, 2x). Optional measuring stage s for x, y and z measurements Transmitted light Illumination via external cold light source with light fiber Power supply Stabilized universal power supply unit, 90 - 230 V Leica Microsystems GmbH · Ernst-Leitz-Strasse 17 - 37 · D-35578 Wetzlar

 Open the catalog to page 1
DM3 XL-2

High efficiency for inspection of 6” samples See more, work faster Inspection, process control, or defect and failure analysis is all about speed: Any defect can hold production up; you need a microscope that allows your team to detect defects as fast and as accurately as possible. Seeing more means working faster. The DM3 XL inspection system provides a unique objective to rapidly scan large components up to 6". The macro overview objective with a magnification of 0.7x captures a field of view of 35.7 mm at once – 30% more than with available scanning objectives. The DM3 XL Inspection System...

 Open the catalog to page 2
DM3 XL-3

LED for all contrast methods The DM3 XL uses LED illumination for all contrast methods: brightfield, darkfield, differential interference contrast (DIC), polarized light, and oblique illumination. LED illumination provides a constant color temperature and offers real-color imaging at all intensity levels. This allows you to always see the sample in the same color and get reproducible results. With a long lifetime of 35,000 hours and low power consumption, LEDs also offer an enormous cost savings potential and optimize the company's carbon footprint. > True-to-life color imaging at all intensity...

 Open the catalog to page 3
DM3 XL-4

Work Comfortably and Intuitively Simplified operator controls Different stage inserts for your specific sample needs Ergonomically designed microscopes improve more than comfort – they help to increase productivity as muscle strain gets reduced. The DM3 XL supports your team to deliver optimal results, even after long working hours. No matter what sample size and sample type you have to inspect, the DM3 XL offers you a choice of different stage inserts – metal inserts, wafer holders or mask holders are available. To easily locate the samples on the stage, the 150 mm x 150 mm stage offers the...

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DM3 XL-5

Digital Image Documentation & Analysis Software solutions for many needs Documentation simplified Upgrade your DM3 XL by choosing a dedicated software module to guide you through your application. The LAS X software provides high-quality solutions, particularly in environments that require high sample throughput. While the Montage module helps to increase throughput by creating high quality extended focus images, the Multistep module automatically captures and easily stores 2D images created from multiple tiled images. Let yourself be guided reliably through the process of acquiring, detecting,...

 Open the catalog to page 5
DM3 XL-6

DM3 XLSYSTEM OVERVIEW im i(^J Leica DFC Intermediate modules Phototube with image erection HCL2T 4/5/7 11622020 Discussions attachment L3/20 for 2 observers Discussions attachment for 3,5 Oder 10 observers Objectiv turret 11555005 Polarizer R/P 11565001 Polarizer, rotatable 11555051 Polarizer L/ICR 11555084 Polarizer RL/P 360° rotatable 11888702 Objective turret BF/DF M32,5x 11888140 Objective turret BF M25,6x 11888141 Objective turret BF M25,7x Compensator and 1C prisms in slider 11890018 Basic stand DM3 XL without IL-Axis Dimensions Reflectors Focusing telescope and eyepieces 11555045 Analyzer...

 Open the catalog to page 6
DM3 XL-7

04/2017 ■ Order no.: 11914834 ■ © 2017 by Leica Microsystems CMS GmbH, Subject to modifications. LEICA and the Leica Logo are registered trademarks of Leica Microsystems IR GmbH.

 Open the catalog to page 7

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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.