MCQ Mass Flow Board 200 Preliminary Datasheet

High Performance Digital Gas Mass Flow Meters and Controllers board Technical Data Sheet Analog Output PWM channel for valves and actuators Programmable LEDs Mass Flow Configuration Flow Out Digital Input Specifications: Range of Measure: 0.01 sccm – 200 sccm (standard) FS: 50 sccm - 100 sccm - 500 sccm (on request) Fully digital Needs no external power and control unit USB interface Modular Architecture I2C BUS for digital devices (Relative Humidity, Temperature, Differential Pressure sensors) 4 Digital Input 2 PWM channels 2 programmable output analog channels (0 - 5 V) Power Supply: 12 – 36...

High Performance Digital Gas Mass Flow Meters and Controllers board Accuracy PERFORMANCE SPECIFICATION Response Time for Change of SetPoint Sensor: 4 ms Controller: 50 ms Power Supply Operation Pressure Working Temperature MASS FLOW CONFIGURATION Materials Valve Steel/Brass, Viton Materials Tubes OPERATING SPECIFICATION Mass Flow Rates 0.01 sccm – 200 sccm (standard) FS: 50 sccm - 100 sccm 500 sccm (on request) Input channel 4 digital input (Normally Open) to set Flow Board parameters for standard remote control of MFC I2C BUS with build-in drivers for: - Sensirion SHTxx Series (Temperature/Relative...

High Performance Digital Gas Mass Flow Meters and Controllers board The image below illustrates you the interfaces and connections of the Board. @ Power © Actuators @ Flow © USB © 485 Connectors * Control A Connector* Connector @ Flow Sensor © Analog I/O © Digital Input All the accessories (valves, tubes and power supply) are provided by MCQ Instruments. You also need a standard USB cable (A plug to B plug). Technical Concept:

High Performance Digital Gas Mass Flow Meters and Controllers board Digital Input: 4 digital inputs for external communication with external devices or external switches or remotes. The digital input channels of FLOW BOARD are TTL and CMOS compatible. Digital Input Circuit: The digital input circuits have a 10 KOhm pull up resistor to 3.3 Volt, as illustrated in the figure below. This forces the digital inputs to be normally high, and allows contact closures to be connected directly between the digital input channels and GND which will pull the channel low when contacts are closed. Digital Inputs...

High Performance Digital Gas Mass Flow Meters and Controllers board Actuator Input: ANALOG OUTPUT 2 (PUMP) + ANALOG OUTPUT 2 (PUMP) ANALOG OUTPUT 1 (PUMP) + ANALOG OUTPUT 1 (PUMP) - Proportional Valve 1 & 2 PWM Output 0-10 V, with PWM frequency selectable from 1 KHz to 20 KHz Proportional Valve 1 Output is used for closed loop in Mass Flow controller configuration. Proportional Valve 2 can be used with any actuator requiring PWM input. Proportional Valve 2 can be also used to control solenoid valves (ON-OFF) with LOW STATE = 0V and HIGH STATE = 10V Max current for each channel: 150 mA Analog...

High Performance Digital Gas Mass Flow Meters and Controllers board Power Supply: The Flow Board requires a DC supply in the range 12-24 V. Min current supply: 600 mA. DC Input is not polarized. Internal Diode Rectifier provides the right polarization. Power Supply + and - could be connected indifferently to each position of the connector. FAST DAC OUTPUT - (Future Use) FAST DAC OUTPUT + (Future Use) Output non-implemented in the current firmware release. For future use (e.g. sound alarms or piezo actuators).

High Performance Digital Gas Mass Flow Meters and Controllers board Flow Board can assume both MASTER or SLAVE rule in a MASTER/SLAVE environment. Proprietary BUS protocol provides fast and secure communication between each MCQ Instruments device. Flow Boards, Acquisition Boards and Gas Blenders can be connected togheter with a maximum number on each bus of 64 devices. One MASTER is required on each BUS. MASTER device provides with BUS setup function a scan of the BUS network searching for connected SLAVE devices (each SLAVE device must have a unique address in the range 11-74, Address 10 is...

High Performance Digital Gas Mass Flow Meters and Controllers board ANALOG SETPOINT - ANALOG OUTPUT: Analog Setpoint: When analog setpoint is enabled, MFC setpoint is controlled with external voltage in range 1- 5Volt. 1 Volt -> SETPOINT= 0% of FS 5Volt -> SETPOINT= 100% of FS Max 10% of overflow is permitted When digital setpoint is enabled this input has no effect on SETPOINT. Analog Output: Flow reading output in the range 1-5Volt. 1 Volt -> FLOW= 0% of FS 5Volt -> FLOW= 100% of FS

High Performance Digital Gas Mass Flow Meters and Controllers board User can connect via I2C various sensors using this protocol. The flow board can supply 3.3V DC with a maximum current of 100 mA MCQ Instruments periodically develops drivers for various third-part sensors like Pressure sensors, Relative Humidity and Temperature sensors, etc.. Flow Board actually includes drivers for the following sensors: 1) Sensirion SHTXX series Relative Humidity and Temperature 2) Sensirion SDP600 series Differential Pressure Other drivers can be developed on request. For more information contact [email protected]...

High Performance Digital Gas Mass Flow Meters and Controllers board Physical dimension: Contact MCQ Instruments MCQ s.r.l. Via delle Quattro Fontane, 33 00184 - Rome - Italy Phone: +39 06.48.47.90 Fax: +39 06.99.33.15.98 [email protected] [email protected]