Catalog excerpts
MCQ Sensor Module Digital Mass Flow Meter and Controller Rev. March 2010 V 1.0 (Preliminary)
Open the catalog to page 1Sensor Module MCQ Gas Blender 100 Series Digital Mass Flow Digital Gas Blender High Performance Meter and Controllerfor Mixing Gases and Calibration Routines Technical Data Sheet Firmware update RS232 The sensor module can be used to deliver a controlled flow at the inset of a chromatographic column flow output power supply flow output analog input trimmers proportional valve opamp proportional valve chromatographic column airflow sensor flow output flow input Schematic diagram of the sensor module: Specifications and main characteristics : Unique dynamic range: 0.01 sccm – 200 sccm. Power...
Open the catalog to page 2MCQ Sensor Module Digital Mass Flow Meter and Controller Response Time PERFORMANCE SPECIFICATION Power Supply Operation Pressure Working Temperature Mass Flow Rates 0.01 sccm – 200 sccm (standard) FS: 50 sccm - 100 sccm 500 sccm (on request) Input channel OPERATING SPECIFICATION Regulated 3.3V for digital and 10V for analog DC 1 Digital Input I2C BUS UART 115.200 BPS Output Channel 1 PWM channel for actuator control 2 programmable output analog channels: 0 - 5V, Max 80mA Analog input AVDD DVDD Power Firmware update Debug Technical concepts Figure 2. Block diagram of the sensor module board.
Open the catalog to page 3MCQ Sensor Module Digital Mass Flow Meter and Controller The sensor module can measure flows as low as 0.058sccm, with a sampling rate up to 20Hz. The module detects the gas mass flow through the measure of heat transfer. In presence of gas flow the upstream and downstream distribution is disturbed and the induced asymmetry is measured. To obtain a measure of the gas flow, it is only necessary to connect the gas inlet to the sensor module entrance. In this way, a flow rate up to 200sccm can be determined. It is also possible to increase the measurement range by applying the sensor module in...
Open the catalog to page 4MCQ Sensor Module Digital Mass Flow Meter and Controller Connections: Main components and connections in the sensor module board. gain trimmer offset trimmer airflow sensor UART connector flow inlet programming connector flow outlet EEPROM main connector analog input I2C interface power 10V-3.3V PWM out for valve control Main Connector: (PCN10-20P-2.54DS, Hirose Electric Co Ltd) AVDD AVDD 10V CTRL2 3.3V Analog Analog PWM out GND GND Master Analog Analog Clear GND GND AVDD GND CTRL1 Analog 10V input Figure 5. Pin connections in the main connector board. You may need a female connector...
Open the catalog to page 5MCQ Sensor Module Digital Mass Flow Meter and Controller UART Receiving data line UART Transmitting data line Figure 7. Pin connections in the UART connector Master Clear Data signal Clock signal Figure 8. Pin connections in the service connector. This service connector is conceived for debug and firmware update operations. Application hint: mass flow controller Figure 9. Block diagram of the sensor module board when it is used to realize a mass flow controller. For those who want to realize their own mass flow controller, the sensor module can be connected to a proportional valve. It is...
Open the catalog to page 6Digital Mass Flow Meter and Controller Suggested valve amplification circuit: In the image below a suggested amplification circuit for the valve control is shown. The component used is a single channel omni-fet fully auto-protected power MOSFET, the VNS1NV04. Important Notice MCQ Instruments reserves the right to make corrections, modifications, enhancements, improvements and other changes to its products and services at any time and to discontinue any product or service without notice. Customers should obtain the latest relevant information before placing orders and should verify that such...
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