ME509
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ME509 datasheet FLUSH DIAPHRAGM, PIEZORESISTIVE CERAMIC PRESSURE SENSOR Metallux ME509 pressure sensors are made with a ceramic base plate and a flush diaphragm, based on the piezoresistive principle. Metallux ME509 pressure sensors are specifically designed to measure very low pressure. The Wheatstone bridge is screen printed on one side of the flush ceramic diaphragm which is, in turn, glued to the sensor’s body. The bridge faces the inside where a cavity is made and the diaphragm’s opposite side can therefore be exposed directly to the medium to be measured. Higher sensitivity is reached thanks to a larger diameter (32.4 mm), thus allowing the measure of pressure values as low as 200 mbar. Because of the Al2O3 ceramic excellent chemical resistance (aggressive gases, most of solvents and acids, etc.), no additional protection is normally required. Metallux ME509 sensors are thermally compensated by laser-adjustable PTC resistors and the use of ceramic ensures a high linearity across the entire range of measurement, reducing effects of hysteresis to a minimum. FEATURES High sensitivity, low nominal pressure values Excellent resistance to corrosion and abrasion Thermally compensated Extended customization Designed to measure very low pressure Pressure sensors family tree ME600 (P+T) Measuring cell Curren t loop Not ratio Piezore sistive Gau ge Al 2O3 96% Sign al Conditione d Ø18 mm Sign al Conditione d Ø9 mm. With housing Also available in not thermally compensated version Digitally trimmed offset, also available not thermally compensated 3 Not available with sapphire diaphragm. 4 Suitable for low pressure range (≤1 bar) 2 Piezore sistive Gau ge sealed gau ge absolu te Capacitve Gau ge sealed gau ge absolu te Measuring cell METALLUX - Via Moree 12 - 6850 Mendrisio – Switzerland Metallux SA reserves the right to change this datasheet without notice Flush diaphragm Thermally compensated Measuring cell METALLUX Pressure sensors

ME509 datasheet Technical characteristics Parameters Sensor type Technology Diaphragm material Weight Response time Supply voltage Offset Current cons. Operating temperature Storage temperature Bridge impedance Compliant with Flush diaphragm, gauge (absolute version available only for 1 bar version) Piezoresistive Ceramic Al2O3 96% (standard), 99.6% or sapphire (on request) ≤ 17 (ceramic cell only) ≤1 2...30 - 0.1 ± 0.1 (Other nominal values available on request) ≤ 1.3 @ 10V -40...+135 (-40 °F...+275 °F) -40...+150 (-40 °F...+302 °F) 11 ± 30% REACH, RoHS, Conflict Minerals Free Nominal...

ME509 datasheet Mechanical drawings and electrical schematics Top View Side View T = sensor total thickness (see pag.2) Bottom View All quotes are in mm [inch] – General tolerance ISO 2768-1 M Electrical terminations Example: type 03, pre-tinned soldering pads Example: type 01, 5 pins L = 13.0 ± 0.5 [ 0.51 ± 0.02 ] Example: type 4 NOMEX™ cable Other types available Type 02 : 4 pins L = 13 ± 0.5 (without LO (-)) Type 05 : PVC flat cable, 50.8 mm, Op. Temp: -20°C...+105°C Type 99 : customization on request Pitch: 2.54 ± 0.05 [ 0.1 ± 0.002 ] Cable length: 50.8 ± 2 [ 2 ± 0.08 ] Stripping...

ME509 datasheet Ordering code ME509 Sensor type Absolute (only 1000 mbar version) Gauge Pressure range 0...200 mbar [0...3 psi] 0...500 mbar [0...7 psi] 0…1000 mbar [0...14 psi] Others on request (please specify) Sensitivity adjustment Without On request Thermal offset shift adjustment ≤ ± 0.06 % FS/K (not thermally compensated) ≤ ± 0.04 % FS/K ≤ ± 0.02 % FS/K Others on request (please specify) Termination type 5 pins 13 mm ± 0.5 mm, pitch 2.54 mm 4 pins 13 mm (without LO (-)) ± 0.5 mm, pitch 2.54 mm 5 pre-tinned soldering pads, pitch 2.54 mm NOMEX™ cable 50.8 mm – 5 wires, pitch 2.54 ± 0.5...