SEMICON CUPLA SERIES
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Catalog excerpts

SEMICON CUPLA SERIES - 1

JQA-EM4057 JQA-2025 NITTO KOHKI Co,.LTD. NITTO KOHKI Co,.LTD. Headquarters Couplings Division Research Center SEMICON CUPLA SERIES Nitto Kohki’s SEMICON CUPLA series are used in piping for various chemicals for semiconductor manufacturing processes and biochemical plants. NITTO KOHKI CO.,LTD.

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SEMICON CUPLA SERIES - 2

“Improved quality” is the greatest theme in the semiconductor industry, which is making remarkable technical innovations. As various chemicals used in the manufacturing process of semiconductor ICs become purer and Piping for semiconductor production equipment and machinery purer, higher quality and performance are Pipe connections for chemical tanks required in CUPLA, a series of quick connect couplings used in the pipe parts. Piping for biotechnology equipment Pure water piping Piping for equipment for scientific, chemical, medical, and food purposes Chemical resistance that meets various...

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SEMICON CUPLA SERIES - 3

Nitto Kohki responds to the needs of electronics industry with innovative ideas. Standard series SP Type Plugs are mounted on the chemical container. Body and valve springs are stainless steel (SUS304). Components are electropolished for enhanced corrosion resistance. Abundant size variation. Sealing material can be selected to suit you fluid and application. Typical Applications Solvent Developer Solvent Developer (with “O-ring” sealing) (with fluoropolymer resin valve) Developer Weak acid Strong Alkali The body and spring material of stainless steel (SUS304), and valve of fluoropolymer...

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SEMICON CUPLA SERIES - 4

Opening the door to the next generation by developing new technologies! Nitto Kohki is constantly challenging the new technologies based on the vast experiences and high-grade know-how nurtured in the fields of fluid engineering. Nitto Kohki’s depth of unique technologies and dedicated research has been proven by numerous patents, which led to the development of 25,000 different Cupla variations. Applications diversify from general household to high-tech Research and development capabilities addressing the needs of market. Various patented technologies. Unique engineering capability....

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SEMICON CUPLA SERIES - 5

Refer to the following terms when checking Cupla specifications. Body Material Seal Material This indicates the material that is used for the plug body or socket body that forms the flow path of fluid through the Cupla. This shows the material used to seal the Cupla, usually an O-ring. Working Temperature Range Sizes This shows the minimum and maximum temperature, in-between which the Cupla with the seal material can be used. However, it does not mean that they cannot be used continuously at the minimum or maximum working temperatures. Please check with us if you need Cuplas in such extreme...

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SEMICON CUPLA SERIES - 6

Standard series Features Body and valve springs are stainless steel (SUS304, SUS316). Body is electropolished for enhanced corrosion reistance. Sealing material can be selected to suit your fluid and application, to flexibly comply with your semiconductor production process requirments. Abundant size variations allow choice to suit your application and flow rate. Each plug comes with a dust cap. Specifications Stainless steel (SUS304, SUS316) SPE (electropolished) Body material Size Working pressure Pressure resistance 0.3MPa {3kgf/cm2} Seal material Fluoro rubber Ethylene-propylene rubber...

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SEMICON CUPLA SERIES - 7

Parts List Plug Part name Plug body Valve body assy Valve spring Valve support Remarks Electropolished Electropolished Electropolished Electropolished Part name Socket body Ball Sleeve spring Sleeve Stop ring O-ring Valve body assy Valve spring Valve support *1 : Seal material: Fluoro rubber (FKM), Ethylene-propylene rubber (EPDM), Perfluoroelastomer (P), or Kalrez (KL). *2 : 6 pieces for 1S, 2S, and 3S. 8 pieces for 4S, 6S, and 8S. Remarks Electropolished Electropolished Electropolished Electropolished Electropolished Electropolished Electropolished WAF : WAF stands for width across flat....

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SEMICON CUPLA SERIES - 8

Standard series fluoropolymer resin ensure excellent performance with various chemicals. Body (SUS304) is electropolished for enhanced corrosion resistance. Plug comes with a dust cap. Specifications Electropolished stainless steel (SUS304) Body material Size Working pressure Pressure resistance Seal material Seal material Socket O-ring Employed stainless steel body and Ethylene-propylene rubber* Working temperature range *Please inquire of us for seal materials other than perfluoroelastomer. fluoropolymer resin valves. N m {Kgf-cm} Max. Tightening Torque Size Torque Size and seal material...

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SEMICON CUPLA SERIES - 9

Parts List Plug Part name Plug body Valve body Ass’y Valve spring Valve Support Retaining ring Dust cap for plug Part name Socket body Ball Sleeve spring Sleeve Stop ring O-ring Valve body Valve spring Valve support Remarks Electropolished Electropolished Electropolished Remarks Electropolished Electropolished Electropolished Electropolished *3 : Any of seal materilas (namely, fluoro rubber, ethylene-propylene rubber, and perfluoroelastomer) can be used as a seal material. WAF : WAF stands for width across flat. Container capacity Container capacity ... indicates connection capability...

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SEMICON CUPLA SERIES - 10

Standard series Size Torque Interchangeability Can be connected with plugs of SCS type of the same size. See the interchangeability check list on page 8. Min. Cross-Sectional Area Model Note: If dusts are attached to the plug, seal materials inside the socket will be damaged when coupled. Always keep the plug clean. Parts list Fluoropolymer resin packing seal and perfluoroelastomer packing seal are used to reduce required connection load and *1 : The all-in-one valve ass’y for SCY-1S and SCY-2S is made of PFA. *2 : SCY-1S and SCY-2S are not electropolished. *3 : The valve support for SCY-1S...

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SEMICON CUPLA SERIES - 11

Semi-standard series Body material Stainless steel (SUS304) SPE (Electropolished) Working pressure Pressure resistance series, but no interchangeability with SP type. Seal material Ethylene-propylene rubber The SP-GN type is another version of SP type Seal material Fluoro rubber Seal material Working temperature range Rc thread NPT thread 19/32-18UNS female thread Interchangeability Features When SP type plug is inserted into SP-GN type socket Even if inserted into SP type, the valve of SP-GN type will not open. Body and valve springs are stainless steel (SUS304). The inner diameter of the...

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