MARCH StratoSPHERE Superior Plasma Treatment for High-Throughput Wafer and Panel-Level Packaging The StratoSPHERE™ is a high-throughput plasma treatment system for processing up to 300 mm (12 in.) semiconductor wafers. The patented plasma chamber design provides exceptional etch uniformity, process repeatability, cycle-time performance, and minimal cost of ownership. Its three-axis symmetrical chamber ensures uniform treatment of all wafer areas, and tight control over process parameters ensures highly repeatable results. • Remove contamination before wafer bumping. • Remove organic contamination. • Remove fluorine and other halogen contamination. • Remove metal and metal oxides. • Improve spun-on film adhesion. • Clean metallic bond pads. • Descum wafer of residual photoresist/BCB. • Pattern dielectric layers for redistribution. • Strip/etch photoresist. • Enhance adhesion of wafer-applied materials. • Remove excess wafer-applied mold/epoxy. • Enhance adhesion of gold solder bumps. • Destress wafer to reduce breakage. • Improve spun-on film adhesion. • Clean Aluminum bond pads. • Software-controlled change-over minimizes the transition from 200 mm to 300 mm wafers. • Production-ready wafer handling supports the backside of the wafer. • Modular design allows single or dual-chamber system configuration. • Load ports support 200 mm open cassettes or 300 mm FOUP. • Unique end effector design can transfer a variety of wafer thicknesses and weights. • Chamber kits isolate plasma distribution directly above the wafer, maximizing uniformity and throughput.

Nordson Electronics Solutions builds the future of electronics reliability all across the globe. We’re proud of the decades of service and solutions we’ve provided to enhance semiconductor reliability. No matter where you are, you’ve likely manufactured or purchased a product made reliable with our equipment. The StratoSPHERE offers industry-leading throughput and reliability for semiconductor manufacturing applications, designed to last and provide cutting-edge capabilities continuing a time-honored tradition. Explore the StratoSPHERE system packages. Continue to see how we support the future....