Wafer Cassette

Product catalog summary

Overview: The document details the specifications and features of Palbam Class stainless steel wafer cassettes designed for semiconductor manufacturing. These cassettes are engineered to meet the increasing cleanliness and automation demands in semiconductor fabs, offering reduced particle generation and enhanced compatibility with automated material-handling systems.

Specifications:

Constructed from stainless steel 316, known for its stable molecular properties and high surface quality (20RA), which prevents outgassing.
Non-contaminating and non-deforming, with highly accurate dimensions suitable for robotic handling.
Capable of withstanding baking processes up to 400˚C, with some models up to 450˚C.
Designed and manufactured to SEMI standards, ensuring compatibility with industry requirements.
Fully conductive, allowing for uniform heat distribution over the wafer surface.

Product Variants:

4” & 5” Wafer Cassettes: Include H Bar and slide-on cover, with 25 and 50 slots respectively, suitable for bake ovens.
6” Wafer Cassettes: Available with 25 or 12 slots, designed for both manual and robotic handling, weighing 800 grams.
8” Wafer Cassettes: Various models with H Bar, offering 12 to 25 slots, designed for robotic or push transfer loading.
12” Wafer Cassettes: Lightweight design with 25 slots, capable of withstanding temperatures up to 450˚C, weighing 3.4 kg.

Features & Benefits:

Stainless steel construction ensures durability and high-temperature resistance.
Open design promotes even heat distribution across the wafer surface.
Lightweight and compatible with SEMI Standard E-57, featuring non-outgassing properties.
Custom designs available to fit specific dimensions, with optional handles for 6” and 8” cassettes.

Catalog excerpts

Palbam Class WAFER CASSETTE The dramatic increase in the level and complexity of cleanliness and automation requirements in Semiconductor Fabs, requires wafer cassettes that offer a reduction in particle generation and improved mechanical interface capabilities with automated material-handling systems (AMHS’s) and process tools. Unique Stainless Steel Solutions Palbam Class Stainless Steel cassettes have the following properties: • Non contaminating • Non deforming • Highly accurate dimensions - robotic suitability • Withstands baking processes up to 400°C • Designed and manufactured to 'Semi’ standards •...

Open the catalog to page 2

Palbam Class WAFER CASSETTE The Palbam Class™, innovative Stainless Steel wafer cassette is designed to replace standard plastic cassettes, in the semiconductor manufacturing process. The cassette has been designed to SEMI standard. 6 inch wafer bake cassettes with H Bar & either 25 or 12 slots. Properties: • non-contaminating. • non-deforming. • fully conductive. • withstands temperatures up to 400°C. • with “H” bar. • dimensions are highly accurate. • weighs 800 gr. • designed for both manual and robotic handling. • fits into standard boxes. • Fabrication material: 316 stainless steel. • Handle...

Open the catalog to page 3

Palbam Class WAFER CASSETTE PCPC0207 8 Inch round wafers H bar 25 wafer slots Additional handles Modeled on specific plastic cassette Robotic or push transfer loading

Open the catalog to page 4

Palbam Class WAFER CASSETTE 8" - 200mm BAKE CASSETTES - Without H Bar We offer custom designs to fit your dimensions HANDLE 6" AND 8"

Open the catalog to page 5

Palbam Class WAFER CASSETTE SEMI Standard E-57 compatible.

Open the catalog to page 6

All Palbam Class catalogs and technical brochures

*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.

Brand list