Corrosive Liquid Particle Counter BENEFITS Versatility • • • • Supports a wide range of applications and fluids Programmable particle-size thresholds Designed for easy mobility Compression sampling allows instrument to measure most chemicals, including effervescent ones • External trigger coordinates sampling with process events • Measurements can be made directly out of the bath User-Friendly • Facility Net process control software simplifies The CLS-700 T corrosive liquid sampler is a compression sampler combined with a LiQuilaz® particle counter for effective measurement of particles in fluids contained in unpressurized vessels. It is ideally suited for testing effervescent chemicals. The system eliminates bubbles by pressurizing the sample and forcing the bubbles into solution. The CLS-700 T corrosive liquid sampler can be integrated into a wet bench for continuous particle monitoring, or located on a cart for increased mobility. When integrated into the wet bench, the sampling system can be started or stopped by the tool, including automatic shutoff during a bath change, to prevent the injection of chemical foam or air into the particle counter. The CLS-700 T corrosive liquid sampler is fully compliant with SEMI C1 for particle measurement of process chemicals. Without measurement there is no control pmeasuring.com online sampling by providing alphanumeric paging, sensor status, tabular and SPC charts, and time plots • SamplerSight batch sampling software facilitates all aspects of data management, including sophisticated data storage, retrieval, and report generation • Designed for quick cleanup when switching from one liquid to another Cost Reduction • 100% view volume means quicker process qualification • Real-time characterization and analysis for immediate response to anomalies means less waste Particle level measurement in effervescent liquids Wet process monitoring Chemical pro

Corrosive Liquid Particle Counter Burette volume Assessed volume Maximum compression pressure Exterior surface Wetted surface materials Sample temperature Zero count Dimensions (l, w, h) Weight 10 – 150 °C at 45 psi or less (max. 120 °C at 60 psi); Sulfuric acid 100 °C max. <1 count/ml 16 x 10 x 16 in (41 x 26 x 39 cm) 34 lb (15.5 kg) Communications Environment Software Sampling Factory requirements RS-232 or RS-485 Temperature: 10 – 35 °C; Humidity: non-condensing SamplerSight, Facility Net Optionally controlled via external trigger Power: See sensor requirements. Gas pressure: 70 – 150 psi....