All data subject to change without prior notice. PM 0003P EN (May 2013/0) A 100 L ES Integrated light duty dry pump for fast pump down. The perfect solution for load-lock and transfer chambers.

A 100 L ES Integrated light duty dry pump for fast pump down. The perfect solution for load-lock and transfer chambers. Because sustainability is a concern of everyone, we have developed an innovative Energy Saving (ES) solution to further decrease the power consumption of the proven A 100 L. Fully integrated and automatically controlled, the Energy Saving option reduces power consumption by 50  %, providing significant cost of ownership reduction with no impact to throughput and footprint. In addition, the Energy Saving option features lower base pressure and lower noise level. Customer benefits...

Technical data Pump model Pumping speed Typical ultimate pressure Power supply voltage, 3 phases, 50-60 Hz Power consumption - at ultimate pressure - idle mode1 Max. noise level at full speed Max. volume size Cycling period, max. on 25 liters volume Continuous inlet flow, max. Typical vibration acceleration (at inlet flange 10 - 1,000 Hz) Typical vibration displacement (at inlet flange 10 - 1,000 Hz) Typical vibration speed (at inlet flange 10 - 1,000 Hz) Cooling water connection Cooling water flow, min. Compressed dry air (CDA) connection Compressed dry air (CDA) pressure supply, min. Compressed...

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