A 200 L Multi-stage Roots pump for light duty processes with the highest throughput in the integrated pump market

Multi-stage Roots pump for light duty processes with the highest throughput in the integrated pump market The new A 200 L guarantees highest throughput for load lock applications thanks to a 200 m3/h peak pumping speed, a low base pressure and its suitability for heavy duty cycles. As an illustration: The A 200 L is compatible with a cycle rate of up to 300 pump downs per hour on a 20 liters load lock chamber, which is over three times the maximum cycle rate of the 100 m3/h class A 100 L. The A 200 L is also suitable for other light duty applications from the use in transfer chambers over SEM...

Multi-stage Roots pump for light duty processes with the highest throughput in the integrated pump market Pumping speed Pump down curves on 20 liters Pressure [hPa] Pressure (hPa) Pumping speed speed (m/h] [m3 /h) Pumping Pump down curves on 20 liters 1000

11 Ultimate pressure 2) Cycle dependent 3) Horizontal inlet only A 200 L without RS-232/RS-485 interface with RS-232/RS-485 interface Tool interface 16 pins I/O 19 pins I/O 16 pins I/O 19 pins I/O

The A 200 L is 100 % interchangeable with the 100 m3/h class A 100 L. Thanks to the same dimensions as well as to the identical electrical and water cooling connections, the A 200 L can easily replace the A 100 L if higher performance is needed. There is no need to invest in equipment modifications. Customer benefits Top performance and unrivaled throughput The lowest footprint of its class and dual inlet position allow for easy system integration Energy-efficient and cost-saving High cleanroom compatibility thanks to low noise and vibration levels Integrated self-monitoring system High reliability,...

Vacuum solutions from a single source Pfeiffer Vacuum stands for innovative and custom vacuum solutions worldwide, technological perfection, competent advice and reliable service. Complete range of products From a single component to complex systems: We are the only supplier of vacuum technology that provides a complete product portfolio. Competence in theory and practice Are you looking for a perfect vacuum solution? Please contact us: Pfeiffer Vacuum GmbH Headquarters · Germany T +49 6441 802-0 [email protected] All data subject to change without prior notice. PM0006 PEN (July 2015/5)...