*mymedicalexpo

A4 Series

Product catalog summary

Introduction
Pfeiffer Vacuum introduces the A4 series of energy-efficient dry multi-stage Roots process pumps designed for semiconductor and coating applications. These pumps address the challenges of harsh duty processes in semiconductor production, offering a range of pumping speeds from 100 to 2,300 m³/h. The A4 series is noted for its enhanced corrosion and by-product condensation resistance, making it suitable for the latest technology nodes of 20 nm and below.

Product Lines and Compatibility
The A4 series includes two product lines compatible with previous models, offering three pump models for non-critical applications and ten models for harsh processes. This compatibility ensures flexibility and ease of integration into existing systems.

Technical Specifications
The pumps feature an extended operating temperature range to prevent by-product deposition, high corrosion resistance, and high temperature precision bearings for enhanced reliability. The A4X series, in particular, offers improved lifetime, making it ideal for demanding CVD and etch processes.

Customer Benefits

High energy efficiency due to multi-stage Roots technology and efficient motors.
Wide operating temperature range to protect against precursor cracking.
Corrosion-resistant materials for increased pump lifetime.
High Mean Time Between Failures (MTBF) and low cost of ownership.
High particle tolerance for increased tool uptime.
Extended monitoring functionalities for better pump condition control.
Compliance with Semi S2 and UL standards.

Energy Efficiency and Maintenance
The A4 series is among the most energy-efficient solutions for CVD applications, featuring low power consumption, idle mode capability, and user-friendly speed adjustments. The pumps require low maintenance due to improved particle tolerance and corrosion resistance, reducing operating costs.

Technical Data
The document provides detailed technical data for various pump models, including maximum peak pumping speed, ultimate pressure, power consumption, cooling requirements, and dimensions. The pumps operate within a temperature range of 5 to 40 °C and are equipped with standard inlet and exhaust flanges.

Order Number Guide
The order number guide provides a detailed breakdown of the pump version, model, application, temperature management, voltage, and other specifications to assist in selecting the appropriate pump configuration.

Conclusion
Pfeiffer Vacuum offers a comprehensive range of vacuum solutions, from single components to complex systems, supported by expert advice and reliable service. The A4 series represents a significant advancement in energy-efficient vacuum technology for semiconductor and coating applications.

Catalog excerpts

A4 SERIES Energy efficient dry multi-stage Roots process pumps for all semiconductor and coating applications

Open the catalog to page 1

A4 series Energy efficient dry multi-stage Roots process pumps for all semiconductor and coating applications New generation of harsh duty process pumps Pfeiffer Vacuum introduces the new A4 series. Harsh duty processes in semiconductor production always provide new challenges for vacuum pumps. Based on the proven and energy efficient multi-stage Roots technology, the A4 series offers a wide range of dry pump solutions, with different pumping speeds from 100 to 2,300 m3/h. Compared to previous process pumps, the corrosion and by-product condensation resistance have been increased significantly...

Open the catalog to page 2

The most energy efficient solution for CVD applications Intelligent Low maintenance Thanks to its multi-stage Roots technology and high efficiency motors, the power consumption of the A4 series under process operation is amongst the lowest of its class. Combined with the idle mode capability and user-friendly rotational speed adjustments, the usage of these dry pumps supports an optimal reduction of operating costs. Equipped with a new sophisticated monitoring system, the A4 series includes new functionalities to improve trouble shooting and prevent wafer scrap during process operation. Through...

Open the catalog to page 3

A4 series Energy efficient dry multi-stage Roots process pumps for all semiconductor and coating applications

Open the catalog to page 4

A4 series Energy efficient dry multi-stage Roots process pumps for all semiconductor and coating applications A4H pumping speed No N2 purge Pumping speed [m3/h] Pumpingspeed (m3/h) A 204 H/X, A 804 H/X, A 1504 H/X, A 1804 H/X, A 2404 H/X For critical applications (Harsh/Extreme) Pumping speed [m3 Pumpingspeed (m3/h)/h] A4H/X pumping speed No purge 10000

Open the catalog to page 5

Technical data 11 Subject to pump T° setting

Open the catalog to page 6

DN 50 ISO-KF DN 100 ISO-K DN 160 ISO-K DN 160 ISO-K DN 160 ISO-K DN 40 ISO-KF DN 40 ISO-KF DN 40 ISO-KF DN 40 ISO-KF DN 40 ISO-KF < 65 dB(A) < 68 dB(A) < 69 dB(A) < 69 dB(A) < 69 dB(A)

Open the catalog to page 7

Order number guide A4 series a - Version H: Harsh X: Extreme b - Pump model A: A 204 B: A 804 C: A 1504 D: A 1804 E: A 124 F: A 604 G: A 1204 H:A 2404 c - Application 4: Large volume1 7: Standard e - Functional block temperature management S: STD version (STD) L: ELT version (Cold) H: EHT version (Hot) f - Roots pump temperature management S: STD version (STD) L: ELT version (Cold) H: EHT version (Hot) 0: NA (no Roots) g - Voltage 1: Low voltage 60 Hz 6: High voltage 60 Hz j - Inlet flange connection 0: Without 1: DN 50 ISO-KF k - Roots by-pass 0: NA (no Roots) 1: With standard by-pass 1) Large...

Open the catalog to page 8

Order number matrix A4 series Order number Harsh Extreme Pump model Functional block temperature management Roots pump temperature management Cold Version Inlet flange connection Roots by-pass With standard by-pass

Open the catalog to page 9

Vacuum solutions from a single source Pfeiffer Vacuum stands for innovative and custom vacuum solutions worldwide, technological perfection, competent advice and reliable service. Complete range of products From a single component to complex systems: We are the only supplier of vacuum technology that provides a complete product portfolio. Competence in theory and practice Are you looking for a perfect vacuum solution? Please contact us: Pfeiffer Vacuum GmbH Headquarters · Germany T +49 6441 802-0 [email protected] All data subject to change without prior notice. PM 0004 PEN (January 2016/10)...

Open the catalog to page 10

All Pfeiffer Vacuum GmbH catalogs and technical brochures

*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.

Brand list