A4 Series
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A4 SERIES Energy efficient dry multi-stage Roots process pumps for all semiconductor and coating applications

A4 series Energy efficient dry multi-stage Roots process pumps for all semiconductor and coating applications New generation of harsh duty process pumps Pfeiffer Vacuum introduces the new A4 series. Harsh duty processes in semiconductor production always provide new challenges for vacuum pumps. Based on the proven and energy efficient multi-stage Roots technology, the A4 series offers a wide range of dry pump solutions, with different pumping speeds from 100 to 2,300 m3/h. Compared to previous process pumps, the corrosion and by-product condensation resistance have been increased...

The most energy efficient solution for CVD applications Intelligent Low maintenance Thanks to its multi-stage Roots technology and high efficiency motors, the power consumption of the A4 series under process operation is amongst the lowest of its class. Combined with the idle mode capability and user-friendly rotational speed adjustments, the usage of these dry pumps supports an optimal reduction of operating costs. Equipped with a new sophisticated monitoring system, the A4 series includes new functionalities to improve trouble shooting and prevent wafer scrap during process...

A4 series Energy efficient dry multi-stage Roots process pumps for all semiconductor and coating applications

A4 series Energy efficient dry multi-stage Roots process pumps for all semiconductor and coating applications A4H pumping speed No N2 purge Pumping speed [m3/h] Pumpingspeed (m3/h) A 204 H/X, A 804 H/X, A 1504 H/X, A 1804 H/X, A 2404 H/X For critical applications (Harsh/Extreme) Pumping speed [m3 Pumpingspeed (m3/h)/h] A4H/X pumping speed No purge 10000

Technical data 11 Subject to pump T° setting

DN 50 ISO-KF DN 100 ISO-K DN 160 ISO-K DN 160 ISO-K DN 160 ISO-K DN 40 ISO-KF DN 40 ISO-KF DN 40 ISO-KF DN 40 ISO-KF DN 40 ISO-KF < 65 dB(A) < 68 dB(A) < 69 dB(A) < 69 dB(A) < 69 dB(A)

Order number guide A4 series a - Version H: Harsh X: Extreme b - Pump model A: A 204 B: A 804 C: A 1504 D: A 1804 E: A 124 F: A 604 G: A 1204 H:A 2404 c - Application 4: Large volume1 7: Standard e - Functional block temperature management S: STD version (STD) L: ELT version (Cold) H: EHT version (Hot) f - Roots pump temperature management S: STD version (STD) L: ELT version (Cold) H: EHT version (Hot) 0: NA (no Roots) g - Voltage 1: Low voltage 60 Hz 6: High voltage 60 Hz j - Inlet flange connection 0: Without 1: DN 50 ISO-KF k - Roots by-pass 0: NA (no Roots) 1: With standard by-pass 1)...

Order number matrix A4 series Order number Harsh Extreme Pump model Functional block temperature management Roots pump temperature management Cold Version Inlet flange connection Roots by-pass With standard by-pass

Vacuum solutions from a single source Pfeiffer Vacuum stands for innovative and custom vacuum solutions worldwide, technological perfection, competent advice and reliable service. Complete range of products From a single component to complex systems: We are the only supplier of vacuum technology that provides a complete product portfolio. Competence in theory and practice Are you looking for a perfect vacuum solution? Please contact us: Pfeiffer Vacuum GmbH Headquarters · Germany T +49 6441 802-0 info@pfeiffer-vacuum.de All data subject to change without prior notice. PM 0004 PEN (January...