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ADH Series

Product catalog summary

Introduction
The ADH series of high-performance dry pumps are designed for demanding applications in the Solar, Semiconductor, and LED markets, offering pumping speeds from 600 to 4,500 m³/h. These pumps are particularly effective in processes requiring high hydrogen pumping speeds.

Specifications
The ADH series includes models AD 600 H, AD 3060 H, and AD 4560 H, each with varying specifications:

Peak pumping speed for N2 ranges from 600 to 4,500 m³/h.
Peak pumping speed for H2 ranges from 550 to 4,500 m³/h.
Power consumption at ultimate pressure is between 5.5 kW and 6.5 kW.
Noise levels range from 65 to 67 dBA.
Cooling water flow rate is between 8 to 9 l/min.

Performance and Efficiency
The pumps offer high pumping efficiency for light gases, facilitating faster chamber evacuation in semiconductor processes. They are hydrogen-ready, providing optimal efficiency for solar and LED applications. The design includes features to reduce operating costs, such as an idle mode to lower power and nitrogen consumption.

Maintenance and Reliability
The ADH series requires no intermediate maintenance due to oil-lubricated bearings, leading to long maintenance intervals and reduced operating costs. The pumps are equipped with double temperature-controlled water cooling circuits and integrated hot N2 purge to prevent powder accumulation or condensation.

Safety and Robustness
The design and materials of the ADH series ensure high resistance to static and dynamic internal stresses, making them safe for applications involving explosive gases like hydrogen and silane.

Technical Data
Key technical data includes:

Maximum continuous inlet flow for N2 and H2.
Maximum volume to be evacuated.
Dimensions and weight of each model.
Inlet and exhaust connection specifications.

Conclusion
The ADH series offers a comprehensive solution for high-performance dry pumping needs in advanced process applications, combining efficiency, reliability, and safety.

Catalog excerpts

ADH SERIES The new high-performance dry pumps for the latest process applications

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The new high-performance dry pumps for the latest process applications The ADH series was developed specifically for applications in demanding processes of the Solar, Semiconductor and LED markets by offering 600 to 4,500 m³/h pumping speed. Semiconductor: High H2 pumping speed The ADH series performance brings the following advantages to your process: ■■ ALD process throughput: high pumping efficiency for light gases will permit faster chamber evacuation in between process steps. ■■ Epitaxy and EUV: high pumping speed and large flow rate tolerance matches the most demanding process specifications....

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High resistance to process by-products The pumps are equipped with double temperature controlled water cooling circuits and integrated hot N2 purge to prevent powder accumulation or condensation. The powerful motor can handle big loads of powder and guarantees good restart capabilities. Also, carefully selected materials can withstand corrosive cleaning chemistries. Upgraded with a completely new monitoring system the features of the ADH series help to enhance process reliability. An idle mode is available to decrease the operating costs by lowering the power and nitrogen consumption when the...

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The new high-performance dry pumps for the latest process applications WATER IN/OUT

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Pumping speed ADH range pumping speed vspressure(N2) 5000 AD 4560 H pumping speed vs Roots frequency Pumping speedm3/h [m3/h] AD 4560 H with different Roots pump rpm with N2 5000 Roots pump at full speed Roots pump at intermediate speed 2 Roots pump at intermediate speed 1 Roots pump at minimum speed

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Maximum continuous inlet flow - N2 Maximum continuous inlet flow - H2 400 slm Maximum volume to be evacuated 50 m3 Maximum ultimate pressure (50 slm N2 purge) 2 ■ 10-2 hPa Power consumption at ultimate pressure Max noise level at ultimate pressure and at maximum flow rate Power supply, 3 phases, 50/60 Hz1) Max. exhaust overpressure Min. cooling water flow rate for max. continuous inlet flow pump specification Cooling water temperature N2 purge flow range Oil fluid capacity Dimensions (L x W x H) Weight Inlet connection Exhaust connection Pump type Peak pumping speed - N2 Peak pumping...

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Order number matrix ADH series Order number High voltage (380 - 480 V, 3 phases, 50/60 Hz) Dry pump temperature management Roots pump temperature management With check-valve Standard line Powder line

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VACUUM SOLUTIONS FROM A SINGLE SOURCE Pfeiffer Vacuum stands for innovative and custom vacuum solutions worldwide, technological perfection, competent advice and reliable service. COMPLETE RANGE OF PRODUCTS From a single component to complex systems: We are the only supplier of vacuum technology that provides a complete product portfolio. COMPETENCE IN THEORY AND PRACTICE Benefit from our know-how and our portfolio of training opportunities! We support you with your plant layout and provide first-class on-site service worldwide. Are you looking for a Pfeiffer Vacuum GmbH perfect vacuum solution?...

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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.

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