CONTAMINATION MANAGEMENT SOLUTIONS Perfect solutions for airborne molecular contamination management and particle contamination monitoring

CONTAMINATION MANAGEMENT SOLUTIONS Perfect solutions for airborne molecular contamination management and particle contamination monitoring Contamination challenges Contamination such as particles or molecules can impact devices with or without packaging during the manufacturing or storage operations. With more than 10 years of experience in contamination management, Pfeiffer Vacuum provides innovative monitoring and containment solutions that are used notably in the following fields of application: ■■ Microelectronics ■■ Optics ■■ Display manufacturing ■■ Photovoltaics ■■ Pharmaceutical Industry...

Pod Analyzer In-line FOUP monitoring and airborne molecular contamination tracking Sub-ppbv levels of contamination such as acids can degrade process performance and decrease product yield. Fab airborne molecular contamination (AMC) requirements have been defined, but AMC at the equipment and FOUP level needs to be understood and defined as stated by the ITRS1). APA 302 is a unique patented solution to monitor and track in-FOUP AMC in a production environment with or without wafers. LabInFab option To go further in molecule identification, the APA 302 LF (LabInFab) option enables the fab operator...

Response time within 2 min > 80 % > 90 % > 85 % > 90 % > 90 % > 70 %2) 1) Based on IMS technology, includes Ni63 source (< 10mCi) Other options available: please contact us 2) Measured with 500 ppbv of wet HF vapor Total acids1) SO2 H2O Total volatile organics HF < 0.2 ppbv < 0.2 ppbv < 0.5 ppbv 5 % < 25 ppbv < 0.5 ppbv Dimensions LF option performances: safe molecular contamination sampling with impinger and tenax tube (see also next page) Dimensions in mm PFEIFFER^VMCUUM

Pod Analyzer with LabInFab option In-line FOUP monitoring and airborne molecular contamination tracking FOUP measurement with standard recipe FOUP sampling with LF (LabInFab) recipe

Number of traps per FOUP 4 (standard) Sampling flow per trap Up to 1500 sccm Ease of use & sampling reliability Automatic leak test Custom recipe (duration, line purge, flow selection, etc…) LabInFab configurations VOC trapped by Tenax tubes

Moisture and airborne molecular contamination (AMC) such as evaporated fluorine are released in the FOUPs slot-to-slot space during queue times. These elements can generate crystal growth or other defects on patterned wafers which leads to yield loss and performance degradation. APR 4300 is the unique patented solution to remove AMC from wafers and FOUP during queue time. Customer benefits ■ Flexible configuration ■ SEMI S2 compliance ■ 4 FOUPs/cycle ■ Yield enhancement up to 7 %

Process description Pressure (mbar) Vacuum purge duration Conditioning to working pressure (~ 5 min) Vacuum purge process: P < 0.1 mbar N2 purge to atmospheric pressure

Dry Particle Counter Unique particle monitoring inside FOUPs and FOSBs The new ADPC 302 is the unique dry system for monitoring particle contamination inside transportation carriers. The fully automated process localizes and counts particles on the inner surfaces of FOUPs or FOSBs, including the doors. With cycle times of only 7 minutes the ADPC 302 is the ideal in-line system to considerably improve the quality control of wafer production processes. Customer benefits Particle detection from 0.1 to 5 μm (other options available) Fully automated monitoring of carriers (shell and door) Throughput...

Carrier characterization Threshold A 100 PROD Threshold B 10 CLEAN 1 *Thresholds are set up according to customers needs Cleaning strategy optimization Carrier cleaner Carrier cleaner Cleaning quality check

VACUUM SOLUTIONS FROM A SINGLE SOURCE Pfeiffer Vacuum stands for innovative and custom vacuum solutions worldwide, technological perfection, competent advice and reliable service. COMPLETE RANGE OF PRODUCTS From a single component to complex systems: We are the only supplier of vacuum technology that provides a complete product portfolio. COMPETENCE IN THEORY AND PRACTICE Are you looking for a perfect vacuum solution? Please contact us: Pfeiffer Vacuum GmbH Headquarters · Germany T +49 6441 802-0 [email protected] All data subject to change without prior notice. PA 0071 PEN (July 2016/5)...