Turbopumps

Turbopumps
1 / 32 PagesView full catalog

Turbopumps

Product catalog summary
Turbopumps Overview
Turbopumps are sophisticated vacuum solutions used in analytics, semiconductor technology, and industrial processes. They offer pumping speeds from 10 to 2,800 l/s, ensuring cost-efficiency and flexibility. Their reliability is attributed to advanced bearing systems and rotor designs that support high pumping speeds and gas throughput.
HiPace® Series
  • HiPace® 10 – 800: These compact turbopumps feature ball or hybrid bearings, with speeds from 10 to 800 l/s, known for their robustness and reliability.
  • HiPace® 1200 – 2300: These pumps have hybrid bearings, offering speeds from 1,000 to 2,000 l/s, noted for high gas throughput and quick run-up times.
  • HiPace® 300 – 800 M, ATH 500 M: Magnetically levitated pumps with speeds from 300 to 800 l/s, providing low vibration and energy efficiency.
  • ATH 1600 – 3200 M: These magnetically levitated pumps offer speeds from 1,400 to 2,800 l/s, ensuring high compatibility with backing pumps and long-term stability.
Bearing Technologies
  • Hybrid Bearings: These combine ceramic ball bearings with permanent magnetic radial bearings, offering durability and easy maintenance.
  • Magnetic Levitation: Electromagnetic bearings provide wear-free, low vibration operation with automatic balance compensation, eliminating the need for lubrication.
Technical Specifications
The document details technical data for HiPace® models, including pumping speeds for various gases, compression ratios, maximum fore-vacuum pressures, and cooling requirements. The pumps are versatile in installation and suitable for industrial use, with options for corrosive gas versions and extended maintenance intervals.
Applications
HiPace® pumps are suitable for applications such as electron microscopy, mass spectrometry, semiconductor processing, coating technologies, and various industrial and research uses.
Features and Benefits
The pumps are equipped with intelligent sensors and efficient technology, ensuring reliability and extended service life. Integrated electronics reduce cabling costs and enhance maintenance diagnostics. The design emphasizes efficiency, with low vibration operation and an integrated cooling system.
Technical Data
Detailed technical data for each pump model includes connection diameters, pumping speeds for different gases, compression ratios, maximum fore-vacuum pressures, and power consumption. The pumps are designed for industrial use with IP 54 protection class and meet safety standards.
Order Information
The document provides order numbers for standard and corrosive gas versions of each pump model, facilitating easy procurement.
Interface and Connectivity
The pumps offer various interface options such as DN 100 ISO-F, DN 100 ISO-K, and DN 100 CF-F flanges. Connectivity options include Profibus, RS-485, and DeviceNet, allowing for remote and air cooling configurations.
Performance and Applications
The ATH M and ATP M series pumps are noted for clean vacuum capabilities due to lubricant-free magnetic bearings, high gas throughput, and long-term stability. They are suitable for semiconductor production, coating, dry-etching plasma processes, and various industrial and R&D applications. The pumps offer high performance with minimal vibration and noise, and can be installed in any orientation.
Safety and Reliability
The pumps feature a 5-axis magnetic bearing system for real-time rotor position monitoring, ensuring stability and reliability. In case of power failure, the rotor acts as a generator to power the controller, transitioning smoothly to mechanical emergency bearing mode.
Customer Benefits
Key benefits include high backing pump compatibility, low lifetime costs due to maintenance-free technology, and customizable rotation speeds for optimized process adjustments. The pumps also feature ultra-low noise and vibration levels.
Graphical Data
The document includes graphs illustrating the pumping speed for different gases (N2, He, H2, Ar) across various pressure ranges, highlighting the performance of different pump models.
Order Information
Order numbers and configurations for various models are provided, along with contact information for Pfeiffer Vacuum for further inquiries and support.
See more

Catalog excerpts

Turbopumps-1

TURBOPUMPS For perfect vacuum solutions to challenging applications

 Open the catalog to page 1
Turbopumps-3

Turbopumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4 For perfect vacuum solutions to challenging applications . 4 Bearing technologies . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6 HiPace® 10 – 800 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Compact ball or hybrid bearing turbopumps in the pumping speed class from 10 to 800 l/s . . . . . . . . . . . . . Overview of series and applications . . . . . . . . . . . . . . . . . Pumping speeds and dimensions . . . . . . . . . . . . . . . . . . . Technical data and order numbers . . ....

 Open the catalog to page 3
Turbopumps-4

For perfect vacuum solutions to challenging applications With courtesy of CERN

 Open the catalog to page 4
Turbopumps-5

The origin Why are all turbopumps called turbopumps? Because the multitalented pacesetters were invented by Pfeiffer Vacuum over 50 years ago under this very name: a definitive milestone in vacuum technology! Our turbopumps represent the latest generation of future-orientated vacuum solutions for a wide spectrum of uses This spectrum includes not only analytics, vacuum process and semiconductor technology but also coating, research and development as well as industrial applications The turbopump family includes a wide product spectrum in the pumping speed range of 10 to 2,800 l/s . The pumps...

 Open the catalog to page 5
Turbopumps-6

Bearing technologies Hybrid bearing The combination of a ceramic ball bearing on the fore-vacuum side and a permanent magnetic radial bearing on the high vacuum side is called hybrid bearing. This bearing technology does not require electromagnets and has a long service life with maintenance intervals of approximately 4 years. The ball bearing and the operating fluid reservoir can be replaced on site within less than 30 minutes. Permanent magnetic bearing Safety bearing Rotor shaft Ceramic ball bearings

 Open the catalog to page 6
Turbopumps-7

Magnetic levitation Electromagnetic bearings are also called ‘active magnetically levitated‘, because the rotor position is continuously monitored and adjusted accordingly. This enables wear-free, low vibration operation with an automatic out-of-balance compensation. Continuous rotor stability is assured. These bearings are maintenance-free and require no lubrication. Upper safety bearing Upper radial bearing Rotor shaft Lower radial bearing Lower safety bearing Upper axial bearing Lower axial bearing Mounting a turbopump rotor There are five degrees of freedom altogether for mounting a turbopump...

 Open the catalog to page 7
Turbopumps-8

Compact, ball or hybrid bearing turbopumps in the pumping speed class from 10 to 800 l/s HiPace stands for a full range of compact and powerful turbopumps in the pumping speed range of 10 to 2,000 l/s. It provides high cost-efficiency and flexibility, which allows almost all pumps of this range to be installed in any orientation. The proven bearing system guarantees unrivaled reliability. High pumping speeds, high backing pump compatibility and high gas throughput as well as excellent compression for light gases are made possible by the innovative rotor design. Integrated drive electronics The...

 Open the catalog to page 8
Turbopumps-9

High-performance technology Universally applicable The run-up time of the HiPace has been significantly reduced . It makes the pumps ready for action more quickly. This is an incalculable benefit for your production . In addition, we provide extended remote and sensor functionalities which allow you to assess pump data such as temperature, for example . The improved diagnostics make it possible to improve pump availability and support service . We are setting trends with the well thought-out design of the HiPace . The functional housing is partly responsible, as it makes the pumps extremely light...

 Open the catalog to page 9
Turbopumps-10

Pumping speeds and dimensions Pumping speed HiPace® 400, DN 100

 Open the catalog to page 10
Turbopumps-11

HiPace® 800, DN 200 ISO-K with TC 400 HiPace® 700, DN 160 ISO-K with TC 400 HiPace® 400, DN 100 ISO-K with TC 400 HiPace® 300, DN 100 ISO-K with TC 110 HiPace® 80, DN 63 ISO-K with TC 110

 Open the catalog to page 11
Turbopumps-12

Technical data and order numbers Technical data Pump type Connection nominal diameter Flange (in) Flange (out) ISO-KF Venting connection Pumping speed for: Nitrogen (N2) l/s Compression ratio for: Nitrogen (N2) Helium (He) Hydrogen (H2) Argon (Ar) Max . gas throughput at full rotational speed for Nitrogen (N2) hPa l/s Ultimate pressure hPa Rotation speed RPM Run-up time min Cooling type, Standard Cooling water consumption l/min Cooling water temperature °C Max . power consumption W Weight kg 'With drive electronics TC 110 2)with drive electronics TC 400 3)with drive...

 Open the catalog to page 12
Turbopumps-13

Technical data Connection nominal diameter Flange (in) Flange (out) ISO-KF Venting connection Pumping speed for: Nitrogen (N2) l/s Compression ratio for: Nitrogen (N2) Helium (He) Hydrogen (H2) Argon (Ar) Max . gas throughput at full rotational speed for Nitrogen (N2) hPa l/s Ultimate pressure hPa Rotation speed RPM Run-up time min Cooling type, Standard Cooling water consumption l/min Cooling water temperature °C Max . power consumption W Weight kg You can find additional technical data and accessories on the Internet at: www.pfeiffer-vacuum.com Order numbers Pump...

 Open the catalog to page 13
Turbopumps-14

Compact, hybrid bearing turbopumps in the pumping speed class of 1,000 to 2,000 l/s Intelligent sensors The HiPace 1200 to 2300 turbopumps can be mounted upside down. The proven bearing system guarantees unrivaled reliability. Thanks to the mature rotor design, very high values are achieved for the pumping speed, backing pump compatibility and gas throughput as well as compression for light gases. Combined with a reliable sensor system, the HiPace series achieves the highest level of safety on the market. Efficient technology With the proven and optimized bearing system, we offer you not just...

 Open the catalog to page 14
Turbopumps-15

Integrated electronics The integrated drive electronics prevent costly cabling . In addition, they are available with various interface versions with the same structural volume . Through innovative electronic components, we have doubled the lifetime of these powerful drive units . The run-up time of the HiPace has also been considerably reduced, which makes the pump ready to operate in an even shorter time . In addition, we provide extended remote and sensor functions . These allow you to evaluate pump data such as temperatures . Improved diagnostics ensure maximum pump availability through status-based...

 Open the catalog to page 15
*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.