FusionScope

FusionScope

FusionScope

Product catalog summary
Overview: FusionScope is a correlative microscopy platform that integrates Scanning Electron Microscopy (SEM) with Atomic Force Microscopy (AFM) to enhance imaging capabilities. It features a shared coordinate system for seamless alignment and operation within a single software interface, allowing real-time data combination and analysis.
Applications: FusionScope is versatile, supporting material characterization, quality control, failure analysis, and nanostructure characterization. It is suitable for analyzing structural, mechanical, electrical, and magnetic properties of samples, including nanowires, 2D materials, and nanoparticles.
Features: The platform allows interactive overlay of AFM data onto SEM images, enabling 2D and 3D visualizations with nanoscale resolution. It supports various AFM measurement modes, including contact, dynamic, and FIRE modes, with interchangeable cantilevers for advanced measurements like Conductive AFM (C-AFM) and Magnetic Force Microscopy (MFM).
Technical Specifications:
  • Scan Range XY: 22 x 22 μm (Closed Loop)
  • Scan Range Z: 15 μm
  • Imaging Noise: < 50 pm @ 1 kHz
  • Cantilever Probes: Self-Sensing Piezoresistive
  • Measurement Modes: Contact, Dynamic, FIRE, MFM, C-AFM, etc.
  • Electron Source: Thermal Field Emission
  • Acceleration Voltage: 3.5 kV – 15 kV
  • Probe Current: 5 pA – 2.5 nA (300 pA typical)
  • Magnification: 25 X – 200,000 X
  • Detectors: In-Chamber SE (Everhart-Thornley)
  • Max. Sample Diameter: 20 mm (12 mm Full Correlated Mode)
  • Max. Sample Height: 20 mm
  • Max. Sample Weight: 500 g
  • Eucentric Alignment: Automatic
  • Typical Chamber Vacuum: 1-10 μTorr
  • Pumping Time: < 5 min
  • Trunnion Tilt: -10 to 80 Degrees
  • Power: 200-230 VAC; 50/60 Hz; Single Phase 15 A
  • Dimensions (W x L x H): 690 x 835 x 1470 mm
  • Weight: 330 kg
User Interface: FusionScope offers an intuitive and customizable user interface with automation for routine functions, ensuring efficient data handling and easy future access.
Conclusion: FusionScope combines the strengths of AFM and SEM, providing a powerful yet user-friendly platform for a wide range of scientific and industrial applications.
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Catalog excerpts

FusionScope-1

FusionScope is an easy-to-use correlative microscopy platform designed from the ground up to add the benefits of SEM imaging to a wide range of AFM measurement techniques. Featuring an innovative shared coordinate system to automatically align AFM and SEM operations for measurements and sample positioning, within a single software interface you now can easily identify your area of interest, measure your sample, and combine your imaging data in real time. ONE platform... multiple applications Acquire detailed Material Characterization of your samples, including structural, mechanical, electrical, and magnetic properties. Carry out high-level Quality Control of manufactured parts or perform Failure Analysis on electrical components or semiconductor devices. Easily characterize Nanostructures such as nanowires, 2D-materials, and nanoparticles. FusionScope gives you full control to locate your area of interest, position your probe, and perform a wide range of measurements. AFM tip measuring razor blade edge Correlated MFM & SEM data from duplex steel By combining the complementary strengths of AFM and SEM, FusionScope opens the door to a world of new application possibilities.

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FusionScope-2

TRUE correlative microscopy Interactively overlay AFM imaging data onto SEM images while operating the microscope in real time. Create stunning 2D and 3D visualizations with nanoscale resolution. POWERFUL, yet easy to use ...the best of both worlds AFM topography image measured with FIRE mode of two component polymer sample (polystyrene and polyolefin elastomer) Switch between a sub-nanometer resolution AFM and SEM imaging with a simple click of a button to extract your desired data. FusionScope is capable of most standard AFM measurement modes, including contact, dynamic, and FIRE modes. Finite...

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FusionScope-3

AFM tip over graphine membrane SEAMLESSLY combine AFM with SEM With Profile View – an 80-degree tilt of the combined sample stage and AFM scan head – you can position the AFM tip quickly and precisely, even on complex and challenging sample surfaces. AFM topography data of razor blade edge Correlated AFM and SEM data of CPU chip EASY-TO-USE correlative microscopy Focus on your research and let FusionScope do the rest. FusionScope’s software provides automation for most routine functions within an intuitive and customizable user interface. Intelligent data handling organizes all your AFM and SEM...

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FusionScope-4

* Specifications subject to change without notice 1081-300 Rev. B0 Quantum Design Quantum Design, Inc. 10307 Pacific Center Court, San Diego, CA 92121 Tel: 858-481-4400 Fax: 858-481-7410 www.fusionscope.com [email protected]

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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.