VALVES AND REGULATORS FOR HIGH & ULTRA HIGH PURITY GASES

TABLE OF CONTENTS TECHNOLOGY OVERVIEW -- Selecting the right products PRODUCT RANGE OVERVIEW VALVES -- Diaphragm - Low flow valves ·· M4SI ·· M8SI ·· M8.1 ·· M12 ·· M20 -- Bellows - High flow valves ·· K300 ·· HP2000 -- Check valves ·· CAR(S) REGULATORS -- Low flow regulators ·· SIR 100 ·· SIR 200 -- Medium flow regulators ·· SI 220 ·· SI 240 ·· SI 260 -- High flow regulators ·· SI 220 ·· SI 25 PORTING CONFIGURATION -- Valves -- Regulators

To choose the right valve or regulator for your application, and to get the best results, you should identify the following technical parameters: Each product page is designed to provide you the essential technical information at a glance : ★ ROTAREX ^ VALVES - FITTINGS - REGULATORS ALL RIGHTS OF CHANGE RESERVED

ALL RIGHTS OF CHANGE RESERVED ★ ROTAREX ^ VALVES - FITTINGS - REGULATORS

DIAPHRAGM VALVES Technology Max. Working Pressure Temperature Range Flow Capacity (Cv) Material Stainless steel 316L / VAR Stainless steel 316L / VAR BELLOWS VALVES CHECKVALVES K300 p.i8 Technology Bellows Max. Working Pressure 100 bar (1450 psig) Temperature Range -40°C to +120°C (-40°F to +248°F) Flow Capacity (Cv) 0.78 - 45 Material Stainless steel Stainless steel ^ VALVES - FITTINGS - REGULATORS ALL RIGHTS OF CHANGE RESERVED

REGULATORS Technology Diaphragm Inlet Pressure 50 bar (725 psig) Outlet Pressure 2/4/7/10 bar (29/58/102/145 psig) Temperature Range -20°C to +65°C (-4°F to +149°F) Flow Capacity (Cv) 0.2 Material Stainless steel 316L / VAR Technology Diaphragm Inlet Pressure 240 bar (3481 psig) Outlet Pressure 2/4/7 bar (29/58/102 psig) Temperature Range -20°C to +65°C (-4°F to +149°F) Material Stainless steel 316L / VAR Diaphragm 240 bar (3481 psig) 2/4/7 bar (29/58/101 psig) -20°C to +65°C (-4°F to +149°F) 0.2 Stainless steel 316L / VAR Up to 300 Diaphragm 50 bar (725 psig) 10 bar (145 psig) -20°C to +60°C...

VALVES - LOW FLOW VALVES M4SI | DIAPHRAGM VALVE KEY FEATURES -- Assembling, testing & packaging in cleanroom: Class ISO 4 -- Springless -- Ultra High Purity Cleaning -- Individual serial number, for traceability -- Visual Open/Close Indicator on manual valves -- Excellent purgeability -- Multi-port options available Compression tube fittings Female (face seal) Swivel Male (face seal) Swivel DIMENSIONS M4SI - MULTI-TURN VALVE (MT) WITH OPEN/CLOSE WINDOW M4SI - PNEUMATIC VALVE MEDIUM PRESSURE (LPNF, LPNO) M4SI - PNEUMATIC VALVE LOW PRESSURE (BPNF, BPNO) M4SI - PNEUMATIC VALVE HIGH PRESSURE (HPNF,...

SPECIFICATIONS Fluid media Standard, high or ultra high purity corrosive and noncorrosive gases Max. working See table below pressure Pneumatic actuator 5 to 7 bar (73 to 102 psig)* opening pressure Temperature range See table below Flow capacity (Cv) 0.2 *available for BPNF and BPNO pneumatic actuator Nominal seat 4 mm (0,16”) diameter Wetted volume < 1.2 cm3 Burst pressure > 700 bar (10152 psig) Certified max. Helium < 1 x 10-9 mbar.l/s outboard leak rate Certified max. Helium < 1 x 10-9 mbar.l/s across the seat leak rate (at max. pressure) Certified max. Helium < 1 x 10-9 mbar.l/s inboard...

VALVES - LOW FLOW VALVES M8SI | DIAPHRAGM VALVE KEY FEATURES -- Springless -- Ultra High Purity Cleaning -- Individual serial number, for traceability -- Assembling, testing & packaging cleanroom: Class ISO 4 -- Visual Open/Close Indicator on manual valves -- Multi-port options available Female (face seal) Swivel Male (face seal) non-Swivel Compression tube fittings DIMENSIONS M8SI - QUARTER TURN VALVE (LQ) M8SI - PNEUMATIC VALVE (BPNF) ALL RIGHTS OF CHANGE RESERVED

SPECIFICATIONS Fluid media Standard, high or ultra high purity corrosive and noncorrosive gases Max. working See table below pressure Pneumatic actuator 5 to 7 bar (73 to 102 psig) opening pressure Temperature range See table below Nominal seat 8 mm (0.31") diameter Wetted volume < 1.6 cm3 Burst pressure > 700 bar (10152 psig) Certified max. Helium < 1 x 10-9mbar.l/s outboard leak rate Certified max. Helium < 1 x 10-9 mbar.l/s across the seat leak rate (at max. pressure) Certified max. Helium < 1 x 10-9 mbar.l/s inboard leak rate (at max. pressure) CONSTRUCTION MATERIAL fittings Compression tube...

12 VALVES - LOW FLOW VALVES KEY FEATURES - Replaceable seat - Springless - Ultra High Purity Cleaning - Individual serial number, fortraceability - Electropolishing of all internal surfaces - Assembling, testing & packaging in cleanroom: Class ISO 4 - Visual Open/Close Indicator on manual valves - Laser welded diaphragm for maximum reliability Female (face seal) Swivel Male (face seal) BWO for micro-welding head Compression tube fittings non-Swivel VS"or%" M8.1- PNEUMATIC VALVE M8.1 - PNEUMATIC VALVE LOW PRESSURE (LPNF, LPNO) HIGH PRESSURE (HPNF, HPNO) M8.1 QUARTER -TURN VALVE (QT) M8.1 MULTI-TURN...

SPECIFICATIONS Fluid media Standard, high or ultra high purity corrosive and noncorrosive gases Max. working See table below pressure Pneumatic actuator 5 to 7 bar (73 to 102 psig) opening pressure Temperature range See table below Nominal seat 8 mm (0,32") diameter Wetted volume < 1.2 cm3 Burst pressure > 700 bar (10152 psig) Certified max. Helium < 1 x 10-9mbar.l/s outboard leak rate Certified max. Helium < 1 x 10-9 mbar.l/s across the seat leak rate (at max. pressure) Certified max. Helium < 1 x 10-9 mbar.l/s inboard leak rate (at max. pressure) SURFACE FINISH CONSTRUCTION MATERIAL *Add NO...

KEY FEATURES - Tied diaphragm design for positive seat opening and closing - Individual serial number for full traceability - Assembly, testing and packaging in cleanroom: Class ISO 4 - Excellent purgeability due to optional purge ports - 3-port option available BWO Compression tube fittings M12 - PNEUMATIC VALVE (PP2NF, PP2NO) M12 - MULTI-TURN VALVE (MT) ^ VALVES - FITTINGS - REGULATORS ALL RIGHTS OF CHANGE RESERVED