S lynx

S lynx
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S lynx

Product catalog summary
Overview: The S lynx is a compact, flexible, and powerful non-contact 3D surface profiler designed for industrial and research applications. It measures textures, structures, roughness, and waviness across various surface scales, utilizing Sensofar's proprietary 3-in-1 measurement technology.
Applications: The profiler is suitable for a wide range of industries, including automotive, consumer electronics, energy, LCD, materials science, microelectronics, micromanufacturing, micropaleontology, optics, tooling, semiconductors, and watch manufacturing.
3-in-1 Measurement Technology: The S lynx employs confocal, vertical scanning interferometry, and focus variation techniques. This approach minimizes compromises in data acquisition, providing high versatility and performance.
Confocal Profiling: Designed for smooth to very rough surfaces, confocal profiling offers high lateral resolution and vertical repeatability on the nanometer scale. It uses a patented microdisplay scanning technology with no moving parts, ensuring stability and longevity.
Focus Variation: This technology measures large rough surfaces, offering high slope measurement capabilities and fast measurement speeds, ideal for tooling applications.
Vertical Scanning Interferometry (VSI): VSI is used for measuring smooth to moderately rough surfaces, providing nanometer vertical resolution.
Software Features: The SensoSCAN software simplifies data acquisition with features like 3D auto function, live image options, and a guided interface. It supports multiple acquisition settings and is compliant with ISO 25178 standards.
Hardware Specifications: The system features a compact design with integrated sensor head and controller, vibration isolation pads, and a movement system with motorized Z stage and manual XY stage. It supports a large range of objectives and offers adaptable column height.
Technical Specifications: The S lynx provides high precision with a Z stage resolution of 2 nm, maximum vertical scanning range of 25 mm for focus variation, and step height repeatability of less than 3 nm. It operates on Windows 10 and supports advanced software analysis with optional packages.
Company Information: Sensofar Metrology, headquartered in Barcelona, is a leader in surface metrology, offering high-accuracy optical profilers globally through a network of partners and offices in Asia, Germany, and the USA.
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Catalog excerpts

S lynx-1

Compact 3D Optical Surface Profiler

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S lynx-2

Compact. Flexible. Powerful. S lynx is a new non-contact 3D surface profiler designed for use in industry and research. It has been designed as a compact and versatile system. S lynx is able to measure differing textures, structures, roughness and waviness, all across varying surface scales. The S lynx’s versatility makes it appropriate for a broad range of high-end surface measurement applications. Ideal performance is guaranteed by Sensofar’s proprietary 3-in-1 measurement technology, and complemented by the incredibly intuitive operation of the system with the associated SensoSCAN software....

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S lynx-4

Why 3-in-1 technologies? Single-technology systems are subject to a lack of versatility. When confronted with measurement tasks that push the boundaries of their physicsbased limitations, the only option is to manipulate the measurement parameters to favor the requisite result. However, favoring either speed, or resolution or accuracy usually means sacrificing one or both of the others, and the user is thus confronted with some sort of compromise in the data acquisition. With Sensofar’s 3-in-1 approach – as found in the S line of measurement systems – a single click in software switches the system...

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S lynx-5

Sensofar’s confocal system Vertical Resolution Laser and disc scanning microscope Confocal Confocal profilers have been developed for measuring smooth to very rough surfaces. Confocal profiling provides the highest lateral resolution that can be achieved by an optical profiler. Thus, spatial sampling can be reduced to 0.01 μm, which is ideal for critical dimension measurements. High NA (0.95) and magnification (150X) objectives are available to measure smooth surfaces with steep local slopes over 70° (for rough surfaces up to 86°). The proprietary confocal algorithms provide the unique vertical...

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S lynx-6

Automated acquisition 3D auto function This new feature vastly simplifies the data acquisition process. By placing the sample on the desired position, focusing it and selecting 3D auto function, the SensoSCAN software automatically determines the correct illumination (light) and the appropriate measurement range, and then performs the chosen measurement type. A quality result can thus be obtained within just a few seconds.

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S lynx-7

Live image options SensoSCAN software now displays the confocal live image as you have never seen it before. Quality and speed have been improved to yield a frame rate of 9 fps (frames per second) for confocal images and 30 fps for bright field images. Together with the other live image options, samples viewing is now significantly more accessible and flexible. Designed to be simple and easy to use Guided interface Multiple powerful acquisition settings When switching between measurement techniques (confocal, interferometric or focus variation), the system is automatically optimized and settings...

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S lynx-8

ISO parameters SensoSCAN is compliant with ISO 25178. A complete selection of ISO 3D areal surface texture parameters is available: height, spatial, hybrid, functional and volumetric parameters. | 2D and 3D surface texture parameters It is time to play... Interactive analysis tools | Step height and angle 3D and 2D interactive views provide multiple scaling, display and render options. A comprehensive suite of tools for preliminary examination and analysis of 3D or 2D measurements is provided. Dimensions, angles, distances, diameters can be measured and features highlighted with new critical...

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S lynx-9

... and get your results! | Tribology, lubrication and grinding parameters Sequential operators A comprehensive set of operators provides the opportunity to retouch data points, restore non-measurable data, remove form (plane, sphere, polynomial), apply a range of filters and/or generate alternative layers by cropping, substracting or extracting a profile. It is also possible to create analysis templates to apply pre-determined filter and operator configurations to repeated measurements. Analysis report | Volume Obtain a clear and wellstructured report for each measurement, showing the 3D data,...

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S lynx-10

Its incredibly compact design with integrated sensor head and controller results in a small footprint and makes for a robust, and reliable system that is easy to install. Vibration isolation pads give the system high stability in most cases no vibration isolation table is needed. Hardware Adaptable column Sensofar has developed a 4-position column that allows up to 150 mm of height adjustment. Flexible options are designed to avoid restrictions between samples with differing heights. Movement system The S lynx positioning is composed of a motorized Z stage with 40 mm of travel range and high...

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S lynx-11

Objectives Brightfield Focus variation Min. measurable roughness 1 Maximum field of view with 2/3” camera and 0.5X optics. 2 Pixel size on the surface. 3 L&S: Line and Space, half of the diffraction limit according to the Rayleigh criterion.Values for white LED. Spatial sampling could limit the optical resolution for interferometric objectives. 4 For brightfield objectives, 21 scanning planes (confocal). 5 System noise measured as the difference between two consecutive measurements of a calibration mirror placed perpendicular to the optical axis. 6 On smooth surfaces, up to 86º on rough surfaces....

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S lynx-12

SENSOFAR is a leading-edge technology company that has the highest quality standards within the field of surface metrology Sensofar Metrology provides high-accuracy optical profilers based on confocal, interferometry and focus variation techniques, from standard setups for R&D and quality inspection laboratories to complete non-contact metrology solutions for in-line production processes. Sensofar Group is headquartered in Barcelona, also known as a technology and innovation hub in Europe. The Group is represented in over 30 countries through a global network of partners and has its own offices...

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