Large Area 3D Optical Metrology System

The next metrology tool for The S wide is a dedicated system designed to rapidly measure large sample areas up to 300 x 300 mm. It provides all the benefits of a digital microscope integrated into a high resolution measuring instrument. Extremely easy-to-use with one single button acquisition. Sub-micron height repeatability over the entire extended area One shot height measurement up to 40 mm without Z scanning Traceability Every S wide is manufactured to deliver accurate and traceable measurements. Systems are calibrated using traceable standards according to ISO 25178 and VDI 2634-2.

wide areas Software SensoSCAN Software drives the system with its clear, intuitive and user-friendly interface. The operator is guided through the 3D environment, delivering a unique user experience. EXTENDED MEASUREMENTS MODULE SensoSCAN’s extended measurements module allows the user to easily define the measurement layout. Wide areas of up to 450 million pixels are possible. Form deviation from 3D CAD models providing the geometric difference and tolerance measurement Solutions Advanced manufacturing Archaeology & Paleontology Consumer electronics Medical devices Molding AUTOMATING PROCEDURES...

System specifications Objective lenses Measuring principle Fringe Projection (Gray code & Slit, Gray code & Phase Shift) FRINGE PROJECTION Observation types Bi-telecentric lens with 0.243X magnification and 0.015 NA Color camera 5Mpx: 2448x2048 pixels (60 fps) Vertical measuring range 10 mm (up to 40 mm) Max. Extended measuring area 300x300 mm with 10x12 stitched fields (Max. resolution 450 Mpx) XY stage range Manual: 150x100 mm; Motorized: 154x154 mm, 302x302 mm Total magnification (27" screen) 11X LED light sources Green (530 nm) and blue (460 nm) User management rights Administrator, advanced...