SEMIFLOW® CO.65

Product catalog summary

Overview: The SEMIFLOW CO.65 is a non-contact clamp-on flow meter designed for the semiconductor industry. It utilizes ultrasonic sensors to measure flow through rigid plastic tubes without direct contact with the liquid, reducing risks of leaks and contamination.

Key Features:

Contactless flow measurement with compact sensor design.
High chemical resistance suitable for semiconductor applications such as chemical supply, lithography, and wafer cleaning.
High accuracy and repeatability, certified under ISO 9001 and EN ISO 13485.

Technical Specifications:

Measuring Method: Ultrasound transit-time technology.
Measuring Cycle: 10 ms.
Flow Range: Up to 400 L/min.
Tubing Compatibility: Outer diameter 1/4” to 50 A, materials include PFA, PTFE.
Accuracy: Up to 1% of reading.
Interfaces: Includes 0/4-20 mA, RS-485 Modbus, and more.
Operating Voltage: 12-30 VDC, with a current consumption of 30 mA max.
Temperature Range: Media 0 to +90 °C, ambient 0 to +60 °C.
Protection Class: IP65.

Measurement Principle: The device uses ultrasound transit-time technology to measure flow rates by calculating the time difference of ultrasonic waves traveling with and against the flow direction. This time difference is used to determine the velocity of the liquid, which is then used to calculate flow volume.

SEMIFLOW Ex1 Set: Designed for hazardous environments, this set includes the SEMIFLOW CO.66 PI Ex1 sensor and Barrier Box ST Ex1, offering protection against explosion hazards in Zone 1 environments according to ATEX/IECEx standards.

Catalog excerpts

SEMIFLOW® CO.65 Non-Contact Clamp-On Flow Meters SEMIFLOW clamp-on flow meters are specifically designed for the semiconductor industry. The highly precise and robust ultrasonic sensors measure directly through the rigid plastic tube or pipe without contact to the liquid, eliminating risks of leakages and contaminations, thus increasing uptime and maximizing yield. Their compact housing with integrated electronics board is perfectly suited for a convenient system implementation. Contactless flow measurement Compact sensor design Highest chemical resistance Highest accuracy & repeatability Semiconductor Applications → Chemical supply / delivery (CCSS / CDS) → Chemical mechanical polishing / planarization (CMP) → Lithography → Plating → Resist coating → Slurry blending / mixing → Wafer / mask cleaning → Wet etching Intuitive and Easy to Handle 1 Sensor Selection Parameter Setting System Integration

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The SEMIFLOW Ex1 Set enables non-contact liquid flow measurement on rigid plastic tubes and pipes in hazardous environments. The set consists of the intrinsically safe flow sensor SEMIFLOW CO.66 PI Ex1 and the control gear Barrier Box ST Ex1. Device protection level "Gb" for use in Zone 1 according to ATEX / IECEx Measuring Method Ultrasound transit-time Tubing - Outer Diameter 1/4" ... 50 A Tubing - Material PFA, PTFE and other hard plastic RS-485 Modbus, digital input Media / Ambient 0 ... +90 °C at 0 ... +25 °C ambient SEMIFLOW flow sensors use the ultrasound transit-time techology to accurately...

Open the catalog to page 2

SEMIFLOW® CO.65

SEMIFLOW® CO.65

Catalog excerpts

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