Technical Data Sheet The clamp-on-sensors SEMIFLOW CO.66/xxxPI Ex1 combined with Barrier Box ST Ex1 detect the flow rate of liquids in rigid plastic tubes of different diameters within a few milliseconds. Industrial applications in the semiconductor industry are typical: use in wafer cleaning equipment, lithography equipment, mixing equipment, chemical supply systems or slurry lines. The sensors have no contact to the fluid and are suitable for all applications with strict hygienic requirements, e.g. biotechnology, pharmaceutical industries or chemical industry. Due to the switching output the sensors support industrial dosing applications. The RS-485 interface allows bus operation in rough environments. They have complete built-in electronics and can be easily integrated in machines or apparatuses. The sensors used with the Barrier Box ST Ex1 are protected against explosion hazard by gases, vapors or liquids (gas group IIB). The device protection level is "Gb" for use in Zone 1 in compliance with ATEX, IECEx and KTL standards. Type SEMIFLOW Order-No. Order-No. Set (1) Dimensions Fixing holes Weight Sensor (1) (incl. Barrier Box (L x w x H) (approx.) (1) Sensors must be operated solely via the associated Barrier Box ST Ex1 (see corresponding ‘Technical Data Sheet')

Technical Data Sheet Ultrasonic Flow Sensor for Use in Potentially Explosive Atmospheres Material: Homogeneous rigid plastic tubing (e.g. PFA, PTFE, PA, PU) For appropriate acoustic coupling, the sensor channels are equipped with flexible inlays. The use of the inlay is mandatory. NOTE! Sensors are factory calibrated with inlay and the listed tubing (following table). Customized calibration is documented in the sensor calibration report. (1 [Percent] of measurement reading. | (2 Unless requested differently. Limited by tubing capacity only.

Technical Data Sheet Ultrasonic Flow Sensor for Use in Potentially Explosive Atmospheres Calibration Sensors are factory calibrated for water at 23 °C ± 2 K, tube end depressurized; other calibration on request Sensor materials Channel: PMMA black | Inlay: silicone rubber (others on request) | Housing and cover: PP-H gray similar to RAL7032 (pebble gray) | Potting: PU | Cover screws: PA natural | Connector: PA blue | Pins: gold plated brass Labeling Sensor front: Flow direction, sensor type, CE marking, certification details [ATEX, IECEx, KTL], production year, serial number, DM code (product...

Technical Data Sheet SEMIFLOW CO.66/xxxPI Ex1 Ultrasonic Flow Sensor for Use in Potentially Explosive Atmospheres WARNING: The SEMIFLOW CO.66/xxxPI Ex1 sensors must be operated solely via the associated operating unit “Barrier Box ST Ex1”! Interfaces (via Barrier Box ST Ex1) • • • • Current output for flow rate (via Barrier Box ST Ex1) Current output for flow rate: 0/4 … 20 mA RS-485 interface: bus-capable for up to 12 devices Switching output: NPN 0 … 30 V Digital input NOTE: Load to GND. The maximum load depends on the operating voltage. The load at 24 V (recommended) is 1 kΩ. BARRIER BOX Input...

SEMIFLOW CO.66/xxxPI Ex1 Ultrasonic Flow Sensor for Use in Potentially Explosive Atmospheres Switching output NPN, 0 ... 30 V, maximum 100 mA, for applications such as: • Adapting batch process (dosing) • Threshold switch of flow • Slow pulses of volume (max. 20 Hz) Digital input (via Barrier Box ST Ex1) Voltage resistant up to 30 V, freely configurable, for applications such as: • Zero point calibration of flow • Start dosing processes Degree of protection IP65 (in mated condition) Pressure Atmospheric pressure Directives and standards • EMC directive 2014/30/EU • RoHS: 2011/65/EU, exception:...

Technical Data Sheet SEMIFLOW CO.66/xxxPI Ex1 Ultrasonic Flow Sensor for Use in Potentially Explosive Atmospheres Parameter Specification

Technical Data Sheet SEMIFLOW CO.66/xxxPI Ex1 Ultrasonic Flow Sensor for Use in Potentially Explosive Atmospheres Technical drawings Drawings are not to scale. Dimensions in mm, unless otherwise specified. Projection method: ISO Design data (STEP files) for integration will be provided upon request. Please contact us. SEMIFLOW CO.66/080PI Ex1 Top view without lid and screws

SEMIFLOW CO.66/xxxPI Ex1 Ultrasonic Flow Sensor for Use in Potentially Explosive Atmospheres Top view without lid and screws Technical Data Sheet

Technical Data Sheet SEMIFLOW CO.66/xxxPI Ex1 Ultrasonic Flow Sensor for Use in Potentially Explosive Atmospheres Top view without lid and screws

SEMIFLOW CO.66/xxxPI Ex1 Ultrasonic Flow Sensor for Use in Potentially Explosive Atmospheres Top view without lid and screws Technical Data Sheet

Technical Data Sheet SEMIFLOW CO.66/xxxPI Ex1 Ultrasonic Flow Sensor for Use in Potentially Explosive Atmospheres Top view without lid and screws

Technical Data Sheet SEMIFLOW CO.66/xxxPI Ex1 Ultrasonic Flow Sensor for Use in Potentially Explosive Atmospheres Top view without lid and screws Information is subject to change without notice. Registration according to ElektroG: WEEE Reg. No. DE 22125904. SONOTEC is a registered trademark. Manufacturer SONOTEC GmbH Thüringer Str. 33 06112 Halle (Saale) Germany Contact USA Site 2: Nauendorfer Str. 2 06112 Halle (Saale) SONOTEC US Inc. 10 Newton Pl., Ste. 100 Hauppauge, NY 11788 USA

Operating Unit for Flow Sensors for Use in Potentially Explosive Atmospheres Barrier Boxes ST Ex1 are associated apparatuses according to IEC 60079-11 (ATEX/ IECEx) and KTL standards. They are designed to connect intrinsically safe SONOTEC flow sensors located in hazardous areas with possible fire or explosion risks due to explosive gas atmospheres (Zone 1, Group IIB). The boxes are used to limit the supplied energy for the sensors to avoid ignition. They provide power and all necessary data lines. Due to the current and switching outputs, the Barrier Boxes ST Ex1 support industrial dosing applications....

Operating Unit for Flow Sensors for Use in Potentially Explosive Atmospheres Electrical connection - Barrier Box ST Ex1 Screw terminal blocks: To sensor - blue colored (connection of sensor cable) | To machine / external interface - gray colored (cable not in scope of supply) Zh, Caution: Observe carefully all instructions in the operating manual. • Current output for flow rate: 0/4 ... 20 mA • Digital input Current output A NOTE: Load to GND. The max. load depends on the operating voltage, for flow rate At 24 V we recommend 1 kQ.