ECHUCK
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ELECTROSTATIC CHUCK POWER SUPPLY SPELLMAN HIGH VOLTAGE ELECTRONICS CORPORATION • Ground Referenced, Reversible Output • Floating, Reversible Bipolar Output • +24Vdc DC Input • Comprehensive Fault Diagnostics • High Voltage Safety Interlock • OEM Customization Available Spellman’s ESC Series of electrostatic chuck power supplies provide clean and accurate voltages required for electrostatic chuck wafer processing applications. These custom designed, well regulated supplies precisely secure the wafer during lengthy process cycles. Versions are available with a ground referenced reversible output in addition to units featuring a true floating bipolar output with associated floating center tap point. Comprehensive fault diagnostic circuitry monitors power supply functionality and communicates status data to the user interface. Spellman’s ESC Series power supplies are housed in compact, lightweight packages designed for OEM installations requiring minimal system footprint space. Program/Monitor Accuracy: 1% of full scale, ±50mV Dimensions: 9˝W x 1.5˝H x 6.1˝L (228.6mm x 30.5mm x 155mm) Weight: 4.5lbs. (2kg) ESC01.5PN7.5 Output Configuration: Floating, reversible polarity bipolar output with floating center tap Input: +24Vdc, ±10% @ 2 amps, maximum Output: Bipolar, 0 to ±750Vdc (0 to 1500Vdc total) @ 5mA TYPICAL SPECIFICATIONS ESC5PN25 Output Configuration: Single ground referenced HV output, positive or negative polarity Input: +24Vdc, ±5% @ 2 amps, maximum Output: +2kV to -5kV. 2mA @ +2kV, 5mA @ -5kV Short Circuit Current Limit: 5.5mA, maximum Output Isolation: None, ground referenced output Slew Rate: 80ms, typical Short Circuit Current Limit: 5.5mA, maximum Output Isolation: Center tap is isolated for ±2kV from ground Slew Rate: 40ms, typical Maximum Cycle Frequency: 10 times per second Ripple: 2.5Vrms Line Regulation: ±0.7% over specified range Load Regulation: ±0.7% over specified range Maximum Cycle Frequency: 10 times per second Output Voltage Accuracy: <1% of set point between 50-1500Vdc Overshoot: <10% of set point value Program/Monitor Accuracy: 0.5% of full scale, ±50mV Line Regulation: ±0.7% over specified range Load Regulation: ±0.7% over specified range Output Voltage Accuracy: <2% of set point value between 50-5000Vdc Corporate Headquarters