Intelligent Vacuum Metrology

Intelligent Vacuum Transducers for 1200 to 5 x 10-10 mbar Joy in innovation is our main driving force for developing vacuum metrology at its best. The new generation of Smartline sets highest standards with regard to precision, functionality and reliability. Durability That Pays Off The THYRACONT Pirani with extended measuring range activates ionization sensors below a very low pressure threshold. This protects the sensors and improves gauge life. Stay Connected The latest transducers offer an RS485 interface and an additional 0-10 V output or EtherCAT. Time Is Money Smartline‘s intelligent microcontrollers...

Application Example Silicon nitride is used in the semiconductor industry as an insulating material or for masking. It is deposited by PECVD (plasma-enhanced CVD) or LPCVD (low pressure CVD). The feeding of the coating system is done via a load-lock to continuously keep the vacuum in the process chamber at 10"2 to 1 mbar. Challenge The pressure must be measured accurately while evacuating the air lock, in order to take in the wafer into the process chamber at the earliest possible moment to start the coating process. At last the processed wafer is returned to the load-lock. After venting back to...

VSR The combination of piezo and Pirani sensor in the digital VSR vacuum transducer offers high precision and excellent resolution in the rough and fine vacuum range. Microcontroller intelligence automatically manages the optional interplay of both vacuum sensors. Smartline represents cutting edge technology providing safe, precise and cost effective process control. Typical Applications • Load locks • Analysis technology • Coating plants •Vacuum furnaces • Leakage tests • Operational control of roughing pumps • Process engineering • Mass spectrometers • Safety circuits in vacuum systems Smartline...

Technical Data Product Codes _______________________________________________________________________________________ Measuring Principle Diaphragm piezo resistive / Pirani _______________________________________________________________________________________ Materials In Contact With Vacuum Stainless steel 1.4307, nickel, gold, silicon oxide, tungsten, glass _______________________________________________________________________________________ Measurement Range 1200 - 1 x 10-4 mbar (900 - 1 x 10-4 Torr), max. overpressure 4 bar abs. _______________________________________________________________________________________...

Smartline Vacuum Transducer Absolute Pressure 1000 to 1 x 10-4 mbar The processor controlled VSP with robust helix filament is ideal for precise measurements in the fine vacuum range. Smartline represents cutting edge technology providing safe, precise and cost effective process control. Typical Applications •Analysis instruments • Operational control of roughing pumps and vacuum plants • Safety circuits in vacuum systems •Vacuum furnaces • Leakage tests • Freeze drying • Process engineering •Vacuum centrifuges Benefits • Durable Pirani helix filament • High resolution • Good accuracy and excellent reproducibility •Two...

Technical Data Product Codes _______________________________________________________________________________________ Measuring Principle Pirani _______________________________________________________________________________________ Materials In Contact With Vacuum Stainless steel 1.4307, nickel, tungsten, glass _______________________________________________________________________________________ Measurement Range 1000 - 1 x 10-4 mbar (750 - 1 x 10-4 Torr), max. overpressure 4 bar abs. _______________________________________________________________________________________ Accuracy 1000 - 20...

Smartline Vacuum Transducer Absolute Pressure 1000 to 5 x 10-9 mbar The digital combination transducer VSM (Pirani/cold cathode) measures absolute pressure from atmospheric pressure to ultrahigh vacuum. Microcontroller intelligence automatically manages the optional interplay of both vacuum sensors. Smartline represents cutting edge technology providing safe, precise and cost effective process control. Typical Applications • Analysis technology • Coating plants and vapor deposition •Vacuum furnaces • Process engineering • Measuring and controlling in fine and ultrahigh vacuum • Sputtering plants...

Vout /V = 0,6 log (p/mbar) + 6,8 p /mbar = 10 ( (Vout /V – 6,8) / 0,6 ) Technical Data _______________________________________________________________________________________ Measuring Principle Pirani / inverted magnetron, both depending on gas type _______________________________________________________________________________________ Material In Contact With Vacuum Stainl. steel 1.4307, nickel, tungsten, molybdenum, glass, ceramic _______________________________________________________________________________________ Measurement Range 1000 - 5 x 10-9 mbar (750 - 5 x 10-9 Torr), max. overpressure...

VSH Smartline Vacuum Transducer Absolute Pressure 1000 to 5 x 10-10 mbar The digital combination transducer VSH (Pirani/hot cathode) measures absolute pressure from atmospheric pressure to ultrahigh vacuum. Microcontroller intelligence automatically manages the optional interplay of both vacuum sensors. Smartline represents cutting edge technology providing safe, precise and cost effective process control. Typical Applications • Analysis technology • Coating plants and vapor deposition • Sputtering plants • Measuring and controlling in the fine and ultrahigh vacuum range •Vacuum furnaces • Process...

Vout /V = 0,6 log (p/mbar) + 6,8 p /mbar = 10( (Vout /V – 6,8) / 0,6 ) Technical Data Product Codes _______________________________________________________________________________________ Measuring Principle Pirani / Bayard Alpert, depending on gas type _______________________________________________________________________________________ Materials In Contact With Vacuum Stainl. steel 1.4307, Ni, W, Pl, yttrium coated iridium, glass _______________________________________________________________________________________ Measurement Range 1000 - 5 x10-10 mbar (750 - 5 x10-10 Torr), max. overpressure...