Smartline Vacuum Transducer Absolute Pressure 1000 to 5 x 10-10 mbar The digital combination transducer VSH (Pirani/hot cathode) measures absolute pressure from atmospheric pressure to ultrahigh vacuum. Microcontroller intelligence automatically manages the optional interplay of both vacuum sensors. Smartline represents cutting edge technology providing safe, precise and cost effective process control. Sm rt line Typical Applications • Analysis technology • Wide range sensor Pirani / Bayard Alpert • Coating plants and vapor deposition • Sputtering plants • Measuring and controlling in the fine and ultrahigh vacuum range • Vacuum furnaces • Process engineering • Space simulation chambers • The hot cathode sensor is automatically controlled by the Pirani • Pirani with extended range allows operation of hot cathode at lower pressure and increases lifetime • Excellent accuracy and repeatability • Low thermal and electrical interference with the vacuum process • Small volume of the measuring cell e. g. 20 cm3 for VSH88D • Bayard-Alpert with blowing resistant, yttrium coated double filament • Digital RS485 interface and additional analog output signal 1.219-8.6 V or EtherCAT • Digital adjustment of zero and atmospheric pressure via pushbutton or interface • Large, integrated LCD display with background illumination (VSH88DL, VSH89DL) • Display flashes in bright red color in case of error, compared to green ligthing in the normal mode (VSH88DL, VSH89DL) • Easy connection with PLCs • The digital output signal can be transmitted error-free over long distances (up to 500 m) • Baud rate 9.6 kBd to 115 kBd • Insensitive against inrush of air • Rugged, EMI-proof metal housing • Two independent, potential-free relay switch points • Vacuum connection by stainless steel small flange DN 40 ISO-KF or conflat flange DN 40 CF-F • LEDs for device status and switch points • Easily replaceable sensor heads with stored calibration data • Correct pressure readings by means of separate gas type correction factors for Pirani and hot cathode • Suitable for Thyracon

Vout /V = 0,6 log (p/mbar) + 6,8 p /mbar = 10( (Vout /V – 6,8) / 0,6 ) Technical Data Product Codes _______________________________________________________________________________________ Measuring Principle Pirani / Bayard Alpert, depending on gas type _______________________________________________________________________________________ Materials In Contact With Vacuum Stainl. steel 1.4307, Ni, W, Pl, yttrium coated iridium, glass _______________________________________________________________________________________ Measurement Range 1000 - 5 x10-10 mbar (750 - 5 x10-10 Torr), max. overpressure...