Smartline Vacuum Transducer Absolute Pressure 2 x 10-3 to 5 x 10-9 mbar The digital cold cathode transducer VSI measures absolute pressure in the high vacuum range. Its microcontroller intelligence allows for individual adjustment of sensor parameters to the application. Smartline represents cutting edge technology providing safe, precise and cost effective process control. Typical Applications • Analytical instruments • Coating plants and vapor deposition • Industrial furnaces • Process engineering • Sputtering plants • Semiconductor technology • Mass spectrometry • Medical engineering • High energy physics • Measuring and controlling in high vacuum Benefits •kathode sensor is controlled either automatically or manually by the user •Fast ignition due to a special technology •Robust industrial design, rugged, EMI-proof metal housing •Low magnetic stray field •Insensitive against inrush of air due to automatic switch-off •[Two independent, potential-free relay switch points • LEDs for device status and switch points •iHigh measurement accuracy •Easily replaceable sensor heads with stored calibration data •Precise pressure readings by means of gas type correction factor •Suitable for Thyracont 2 and 4 channel display and control units VD12 / VD10 Digital and analog output signal / interfaces: 2.199 - 7.801 Volt, RS485, EtherCAT, Profinet Output signal scalable according to required output characteristics for an easy replacement of existing transducers Large, colored, integrated LCD display with background illumination Easy connection with PCs and PLCs The digital output signal can be transmitted without interference over long distances (up to 500 m) Connector for protection class IP54 available Vacuum connection by stainless steel small flange DN 25 ISO-KF, DN 40 ISO-KF or conflat flange&

Technical Data _______________________________________________________________________________________ Measuring Principle Cold cathode ionization sensor (inverted magnetron), depending on gas type _______________________________________________________________________________________ Material In Contact With Vacuum Stainl. steel 1.4307, nickel, tungsten, molybdenum, glass, ceramic _______________________________________________________________________________________ Measurement Range 2 x 10-3 - 5 x 10-9 mbar (Torr), max. overpressure 4 bar abs. _______________________________________________________________________________________...