Smartline Vacuum Transducer Absolute Pressure 1000 to 5 x 10-9 mbar The digital combination transducer VSM (Pirani/cold cathode) measures absolute pressure from atmospheric pressure to ultrahigh vacuum. Microcontroller intelligence automatically manages the optional interplay of both vacuum sensors. Smartline represents cutting edge technology providing safe, precise and cost effective process control. Typical Applications • Analysis technology • Coating plants and vapor deposition •Vacuum furnaces • Process engineering • Measuring and controlling in fine and ultrahigh vacuum • Sputtering plants Benefits • Wide range sensor Pirani / cold cathode • The cold cathode sensor is automatically controlled by the Pirani • Pirani with extended range allows operation of cold cathode at lower pressure and increases lifetime • Robust sensor design • Small volume of the measuring cell e. g. 9 cm3 for VSM77D • Excellent ignition behavior • Insensitive against inrush of air •Two independent, potential-free relay switch points • LEDs for device status and switch points • Easily replaceable sensor heads with stored calibration data • Correct pressure readings by means of separate gas type correction factors for Pirani and cold cathode •Suitable for Thyracont 2 and 4 channel display and control units VD12 / VD10 Digital RS485 interface and additional analog output signal 1.819-8.6 V or EtherCAT Digital adjustment of zero and atmospheric pressure via pushbutton or interface Large, integrated LCD display with background illumination (VSM77DL, VSM79DL) Display flashes in bright red color in case of error, compared to green ligthing in the normal mode (VSM77DL, VSM79DL) Easy connection with PLCs The digital output signal can be transmitted error-free over long distances (up to 500 m) Baud rate 9.6 kBd to 115 kBd Rugged, EMI-proof metal housing Vacuum connection by stainless steel small flange DN 25 ISO-KF or conflat flange D

Vout /V = 0,6 log (p/mbar) + 6,8 p /mbar = 10 ( (Vout /V – 6,8) / 0,6 ) Technical Data _______________________________________________________________________________________ Measuring Principle Pirani / inverted magnetron, both depending on gas type _______________________________________________________________________________________ Material In Contact With Vacuum Stainl. steel 1.4307, nickel, tungsten, molybdenum, glass, ceramic _______________________________________________________________________________________ Measurement Range 1000 - 5 x 10-9 mbar (750 - 5 x 10-9 Torr), max. overpressure...