Smartline Vacuum Transducer Absolute Pressure 1200 to 1 x 10-4 mbar The combination of piezo and Pirani sensor in the digital VSR vacuum transducer offers high precision and excellent resolution in the rough and fine vacuum range. Microcontroller intelligence automatically manages the optional interplay of both vacuum sensors. Smartline represents cutting edge technology providing safe, precise and cost effective process control. Sm rt line Typical Applications • Load locks • Wide measuring range due to combination sensor piezo / Pirani • Analysis technology • Coating plants • Vacuum furnaces • High accuracy and optimal resolution over the whole measuring range • Leakage tests • Two independent, potential-free relay switch points • Operational control of roughing pumps • Short response time • Process engineering • Excellent reproducibility and long term stability • Mass spectrometers • Safety circuits in vacuum systems • Small measuring cell volume e. g. 2 cm3 for VSR53D • Metal sealed stainless steel sensor, suitable for UHV applications • Filament is protected against oil and solvent vapors by a metal screen • Stable measurements due to optimized temperature compensation • Easily replaceable sensor heads with stored calibration data • Measurements independent of gas type above 20 mbar and adjustable gas type correction factors for Pirani sensor • LEDs for device status and switch points • Digital RS485 interface and additional analog output signal 1.5-8.58 V or EtherCAT • Digital adjustment of zero and atmospheric pressure via pushbutton or interface • Large, integrated LCD display with background illumination (VSR53DL, VSR54DL) • Display flashes in bright red color in case of error, compared to green ligthing in the normal mode (VSR53DL, VSR54DL) • Easy connection with PLCs • The digital output signal can be transmitted error-free over long distances (up to 500 m) • Baud rate 9.6 kBd to 115 kBd • Rugged, EMI-proof metal housing • Protection class IP54 (VSR53E, VSR54E) • Suitable for Thyracont 2 and 4 channel display and control units VD12 / VD10 • Vacuum connection using stainless

Technical Data Product Codes _______________________________________________________________________________________ Measuring Principle Diaphragm piezo resistive / Pirani _______________________________________________________________________________________ Materials In Contact With Vacuum Stainless steel 1.4307, nickel, gold, silicon oxide, tungsten, glass _______________________________________________________________________________________ Measurement Range 1200 - 1 x 10-4 mbar (900 - 1 x 10-4 Torr), max. overpressure 4 bar abs. _______________________________________________________________________________________...