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Microme|x neo 160 Microme|x neo 180

Microme|x neo 160 Microme|x neo 180

Microme|x neo 160 Microme|x neo 180

Product catalog summary
Overview: The Phoenix Microme|x Neo and Nanome|x Neo series are high-resolution X-ray inspection systems offering both 2D and 3D CT capabilities. These systems are designed for a variety of inspection tasks including R&D, failure analysis, and quality control, featuring high positioning accuracy and innovative technologies.
Key Features:
  • Superior pixel resolution with new detectors suitable for inspecting semiconductors and small electronic components.
  • Automated inspection reports and CAD-based µAXI programming for ease of use.
  • Diamond|window technology for faster data acquisition without compromising image quality.
  • 3D CT scans available in as little as 10 seconds.
  • Dose management tools to protect sensitive devices from radiation damage.
  • Advanced image processing with FLASH!Electronics™ technology for optimized inspection results.
Detector Technology: The systems utilize the DXR-HD detector fleet, offering high dynamic range and pixel resolution, suitable for a wide range of X-ray energies. The detectors provide fast data acquisition and real-time dose monitoring.
3D Computed Tomography: Optional 3D CT technology provides high-quality inspection results with voxel resolution down to 2 microns. The nanoCT® capability allows for even higher image sharpness.
PlanarCT Technology: Enables 2D slice or 3D volume evaluation of complex boards without the need for physical cutting, providing clear inspection results.
X|act Software: Provides high-resolution µAXI with CAD-based programming, ensuring high defect coverage and repeatability. The software supports easy pad identification and automated inspection program generation.
Technical Specifications:
  • Available in configurations with 160 kV and 180 kV X-ray tubes.
  • High dynamic detectors with pixel resolutions ranging from 85µm to 200µm.
  • Maximum inspection area of 460 mm x 360 mm, expandable to 610 mm x 510 mm without rotation table.
  • Radiation safety features include a full protective cabinet and dose management tools.
Advantages: The systems offer brilliant live inspection images, minimized setup time, high defect coverage, and comprehensive dose control technology. They are equipped with an OPC-UA interface for data export and analysis.
Conclusion: The Phoenix Microme|x Neo and Nanome|x Neo series provide advanced X-ray inspection solutions with high-resolution imaging, efficient programming, and robust safety features, making them suitable for a wide range of industrial applications.
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Catalog excerpts

Microme|x neo 160 Microme|x neo 180-1

High performance X-ray inspection solution with non-destructive planarCT board inspection Microme|x neo 160 Microme|x neo 180 Nanome|x neo 180

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Microme|x neo 160 Microme|x neo 180-3

Phoenix Microme|x Neo and Nanome|x Neo High resolution 160/180 kV micro- / nanofocus X-ray inspection systems with 3D CT option The Phoenix MicromeIx neo and NanomeIx neo series combines high-resolution 2D X-ray technology and 3D CT in one system. Innovative and unique features and an extreme high positioning accuracy make both systems the effective and reliable solution for a wide spectrum of 2D and 3D offline inspection tasks: R&D, failure analysis, process and quality control. The Phoenix|x-ray X|act technology offers easy to program CAD based µAXI ensuring automated inspection in the micrometer...

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Microme|x neo 160 Microme|x neo 180-4

Waygate Technologies brilliant DXR-HD detector fleet Newest large-size DXR S100 Pro detector in combination with superior pixel resolution defines industry-leading imaging technology: FLASH!TM processed voids in an open µBGA ball: 1,970x geometric zoom for extreme high magnification Exclusive high dynamic DXR250RT detector with enhanced scintillator technology introduces a new industry standard for efficient live inspection: Provides superior 100 μm pixel resolution and frame rates up to 30 frames per second which combines outstanding detectability with high efficiency 300 mm x 250 mm large active...

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Microme|x neo 160 Microme|x neo 180-5

High-resolution 3D computed tomography For advanced inspection and 3D analysis of smaller samples, Phoenix|x-ray’s proprietary 3D CT technology is optionally available. 180 kV high power X-ray technology, fast image acquisition with DXR detector and Diamond|window combined with Phoenix|x-ray’s fast reconstruction software deliver high quality inspection results Maximum voxel resolution down to 2 microns; the nanoCT® capability of the Nanome|x allows even a higher image sharpness nanoCT® of TSVs in an electronic package. The voids in the copper filling are clearly visible. Virtual board slicing...

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Microme|x neo 160 Microme|x neo 180-6

X|act – CAD based inspection: high resolution µAXI for extremely high defect coverage As a solution for µAXI with extremely high defect coverage, Phoenix|x-ray provides its high precision systems Microme|x neo and Nanome|x neo including the unique X|act software package for fast and easy offline CAD programming. Its intuitive new GUI with improved outstanding precision and repeatability, small views with resolutions of only a few micrometers, 360° rotation and oblique viewing up to 70° ensures meeting highest quality standards – even for inspection of components with a pitch of just 100 microns....

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Microme|x neo 160 Microme|x neo 180-7

Your advantages Phoenix Microme|x and Nanome|x neo Brilliant live inspection images due to high dynamic Waygate Technologies DXR-HD digital detector fleet Unique high power 180 kV / 20 W micro- or nanofocus tube for even high absorbing electronic samples Minimized setup time due to highly efficient automated CAD programming Live overlay of CAD and inspection results even in rotated oblique inspection views Extremely high defect coverage and repeatability Best detail detectability 0.5 µm or even 0.2 µm with nanofocus Optional Flash!ElectronicsTM image processing optimizes digital images quickly...

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Microme|x neo 160 Microme|x neo 180-8

Technical specifications and configurations Nanome|x Neo 180 X-ray detector Magnification Total magnification 27” 2K monitor Detail detectability X-ray tube type Max. tube voltage/power on target Microme|x Neo 160 High performance detector DXR S85, 85µm pixel resolution, 13cm x 13cm active area Low maintenance open nanofocus tube with unlimited lifetime, transmission type, 170° cone angle, collimated Low maintenance open microfocus tube with unlimited lifetime, transmission type, 170° cone angle, collimated Diamond|window for up to 3 times faster data acquisition at the same high image quality...

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